Matches in SemOpenAlex for { <https://semopenalex.org/work/W2180236762> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2180236762 abstract "A novel model-based algorithm provides a capability to control full-chip design specific variation in pattern transfer caused by via/contact etch processes. This physics based algorithm is capable of detecting and reporting etch hotspots based on the fab defined thresholds of acceptable variations in critical dimension (CD) of etched shapes. It can be used also as a tool for etch process optimization to capture the impact of a variety of patterns presented in a particular design. A realistic set of process parameters employed by the developed model allows using this novel via-contact etch (VCE) EDA tool for the design aware process optimization in addition to the standard process aware design optimization." @default.
- W2180236762 created "2016-06-24" @default.
- W2180236762 creator A5000720628 @default.
- W2180236762 creator A5008901590 @default.
- W2180236762 creator A5013605756 @default.
- W2180236762 creator A5020263997 @default.
- W2180236762 creator A5021627904 @default.
- W2180236762 creator A5024092243 @default.
- W2180236762 creator A5036199179 @default.
- W2180236762 creator A5058620246 @default.
- W2180236762 creator A5071260916 @default.
- W2180236762 creator A5080178958 @default.
- W2180236762 creator A5089574594 @default.
- W2180236762 date "2009-03-13" @default.
- W2180236762 modified "2023-09-23" @default.
- W2180236762 title "Design specific variation in pattern transfer by via/contact etch process: full-chip analysis" @default.
- W2180236762 doi "https://doi.org/10.1117/12.813882" @default.
- W2180236762 hasPublicationYear "2009" @default.
- W2180236762 type Work @default.
- W2180236762 sameAs 2180236762 @default.
- W2180236762 citedByCount "1" @default.
- W2180236762 crossrefType "proceedings-article" @default.
- W2180236762 hasAuthorship W2180236762A5000720628 @default.
- W2180236762 hasAuthorship W2180236762A5008901590 @default.
- W2180236762 hasAuthorship W2180236762A5013605756 @default.
- W2180236762 hasAuthorship W2180236762A5020263997 @default.
- W2180236762 hasAuthorship W2180236762A5021627904 @default.
- W2180236762 hasAuthorship W2180236762A5024092243 @default.
- W2180236762 hasAuthorship W2180236762A5036199179 @default.
- W2180236762 hasAuthorship W2180236762A5058620246 @default.
- W2180236762 hasAuthorship W2180236762A5071260916 @default.
- W2180236762 hasAuthorship W2180236762A5080178958 @default.
- W2180236762 hasAuthorship W2180236762A5089574594 @default.
- W2180236762 hasConcept C111919701 @default.
- W2180236762 hasConcept C115952470 @default.
- W2180236762 hasConcept C120665830 @default.
- W2180236762 hasConcept C121332964 @default.
- W2180236762 hasConcept C127413603 @default.
- W2180236762 hasConcept C165005293 @default.
- W2180236762 hasConcept C202444582 @default.
- W2180236762 hasConcept C207789793 @default.
- W2180236762 hasConcept C21880701 @default.
- W2180236762 hasConcept C2778334786 @default.
- W2180236762 hasConcept C33676613 @default.
- W2180236762 hasConcept C33923547 @default.
- W2180236762 hasConcept C41008148 @default.
- W2180236762 hasConcept C44870925 @default.
- W2180236762 hasConcept C54725748 @default.
- W2180236762 hasConcept C55396564 @default.
- W2180236762 hasConcept C76155785 @default.
- W2180236762 hasConcept C87717796 @default.
- W2180236762 hasConcept C93389723 @default.
- W2180236762 hasConcept C98045186 @default.
- W2180236762 hasConceptScore W2180236762C111919701 @default.
- W2180236762 hasConceptScore W2180236762C115952470 @default.
- W2180236762 hasConceptScore W2180236762C120665830 @default.
- W2180236762 hasConceptScore W2180236762C121332964 @default.
- W2180236762 hasConceptScore W2180236762C127413603 @default.
- W2180236762 hasConceptScore W2180236762C165005293 @default.
- W2180236762 hasConceptScore W2180236762C202444582 @default.
- W2180236762 hasConceptScore W2180236762C207789793 @default.
- W2180236762 hasConceptScore W2180236762C21880701 @default.
- W2180236762 hasConceptScore W2180236762C2778334786 @default.
- W2180236762 hasConceptScore W2180236762C33676613 @default.
- W2180236762 hasConceptScore W2180236762C33923547 @default.
- W2180236762 hasConceptScore W2180236762C41008148 @default.
- W2180236762 hasConceptScore W2180236762C44870925 @default.
- W2180236762 hasConceptScore W2180236762C54725748 @default.
- W2180236762 hasConceptScore W2180236762C55396564 @default.
- W2180236762 hasConceptScore W2180236762C76155785 @default.
- W2180236762 hasConceptScore W2180236762C87717796 @default.
- W2180236762 hasConceptScore W2180236762C93389723 @default.
- W2180236762 hasConceptScore W2180236762C98045186 @default.
- W2180236762 hasLocation W21802367621 @default.
- W2180236762 hasOpenAccess W2180236762 @default.
- W2180236762 hasPrimaryLocation W21802367621 @default.
- W2180236762 hasRelatedWork W1597293305 @default.
- W2180236762 hasRelatedWork W1973707249 @default.
- W2180236762 hasRelatedWork W2037082886 @default.
- W2180236762 hasRelatedWork W2089232024 @default.
- W2180236762 hasRelatedWork W2120546003 @default.
- W2180236762 hasRelatedWork W2180236762 @default.
- W2180236762 hasRelatedWork W2362146390 @default.
- W2180236762 hasRelatedWork W2487268450 @default.
- W2180236762 hasRelatedWork W2891719965 @default.
- W2180236762 hasRelatedWork W2018128395 @default.
- W2180236762 isParatext "false" @default.
- W2180236762 isRetracted "false" @default.
- W2180236762 magId "2180236762" @default.
- W2180236762 workType "article" @default.