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- W2181518790 abstract "INTRODUCTION NEXCERA, a cordierite (2MgO-2Al2O3-5SiO2) based polycrystalline ceramic has been developed as a cutting-edge material with both an extremely low thermal expansion coefficient of < 0.03 ppm/K and superior mechanical properties. NEXCERA differs fundamentally from a conventional low thermal expansion glass (LTEG) in consisting of a kind of the crystal and slight amorphous phases along grain boundaries. Accordingly, NEXCERA has high dimensional stability for long-term passage and temperature changes as compared to LTEG [1,2]. Taking advantage of these properties, NEXCERA is used as calibration tools and primary standards in the precision metrology field requiring high accuracy and reliability, in addition to structural components of steppers for LSI lithography [3]. In the previous paper, the advantage of NEXCERA as an optical reflecting mirror was discussed through the manufacture of ultra lightweight boxed structures [4]. The present work has been conducted to evaluate the results of surface finishes for actual mirrors. Special emphasis has been placed on the effect of improving ceramic material on the smooth surface achieved by the polishing." @default.
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- W2181518790 date "2010-01-01" @default.
- W2181518790 modified "2023-09-24" @default.
- W2181518790 title "NEXCERA, ZERO THERMAL EXPANSION CERAMICS FOR OPTICAL APPLICATIONS" @default.
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