Matches in SemOpenAlex for { <https://semopenalex.org/work/W2182252862> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2182252862 abstract "A novel Si,.,Ge, channel Metal Oxide Semiconductor field effect transistor (MOSFET) is described. Si,,Ge, alloy used was grown by means of molecular beam epitaxy (MBE). The band structure with Si,.,Ge, shannel MOSFET is different from that with silicon channel MOSFET. Because of this, the performance of the former is better than that of the latter. In the present study, 3-inch-diam, N-type, orientation silicon wafers with resistivity of 2 ohm-cm were used. First, Si,.,Ge, (x=O.l-0.7) layers were grown, whose thickness was 0.5-0.8 nm. Then, silicon buffer layer was grown. After that, gate oxide layer 15 nm thick was grown at a temperature of 800 'C. Following polysilicon growth, polysilicon was doped by implantation of phosphorus. The formations of source and drain were by implantation as well. The I-V curves of output with different dopant concentration were obtained. The main direct current parameters of measured Si,.,Ge,/Si MOSFET are: the threshold voltage V, = -I.3V, the transconductance Gm=100-130 siemens, the breakdown voltage of source and drain is 13-1 6V." @default.
- W2182252862 created "2016-06-24" @default.
- W2182252862 creator A5005727198 @default.
- W2182252862 creator A5017947172 @default.
- W2182252862 creator A5021352857 @default.
- W2182252862 creator A5031283807 @default.
- W2182252862 creator A5040536836 @default.
- W2182252862 creator A5069581593 @default.
- W2182252862 creator A5072413558 @default.
- W2182252862 creator A5081109575 @default.
- W2182252862 date "1998-01-01" @default.
- W2182252862 modified "2023-09-26" @default.
- W2182252862 title "A Novel Si,-,Ge,/Si MOSFET" @default.
- W2182252862 cites W2106096608 @default.
- W2182252862 hasPublicationYear "1998" @default.
- W2182252862 type Work @default.
- W2182252862 sameAs 2182252862 @default.
- W2182252862 citedByCount "0" @default.
- W2182252862 crossrefType "journal-article" @default.
- W2182252862 hasAuthorship W2182252862A5005727198 @default.
- W2182252862 hasAuthorship W2182252862A5017947172 @default.
- W2182252862 hasAuthorship W2182252862A5021352857 @default.
- W2182252862 hasAuthorship W2182252862A5031283807 @default.
- W2182252862 hasAuthorship W2182252862A5040536836 @default.
- W2182252862 hasAuthorship W2182252862A5069581593 @default.
- W2182252862 hasAuthorship W2182252862A5072413558 @default.
- W2182252862 hasAuthorship W2182252862A5081109575 @default.
- W2182252862 hasConcept C110738630 @default.
- W2182252862 hasConcept C119321828 @default.
- W2182252862 hasConcept C119599485 @default.
- W2182252862 hasConcept C127413603 @default.
- W2182252862 hasConcept C145598152 @default.
- W2182252862 hasConcept C160671074 @default.
- W2182252862 hasConcept C165801399 @default.
- W2182252862 hasConcept C171250308 @default.
- W2182252862 hasConcept C172385210 @default.
- W2182252862 hasConcept C191952053 @default.
- W2182252862 hasConcept C192562407 @default.
- W2182252862 hasConcept C195370968 @default.
- W2182252862 hasConcept C2361726 @default.
- W2182252862 hasConcept C25356406 @default.
- W2182252862 hasConcept C2778413303 @default.
- W2182252862 hasConcept C2779227376 @default.
- W2182252862 hasConcept C2779283907 @default.
- W2182252862 hasConcept C3792809 @default.
- W2182252862 hasConcept C49040817 @default.
- W2182252862 hasConcept C544956773 @default.
- W2182252862 hasConcept C57863236 @default.
- W2182252862 hasConceptScore W2182252862C110738630 @default.
- W2182252862 hasConceptScore W2182252862C119321828 @default.
- W2182252862 hasConceptScore W2182252862C119599485 @default.
- W2182252862 hasConceptScore W2182252862C127413603 @default.
- W2182252862 hasConceptScore W2182252862C145598152 @default.
- W2182252862 hasConceptScore W2182252862C160671074 @default.
- W2182252862 hasConceptScore W2182252862C165801399 @default.
- W2182252862 hasConceptScore W2182252862C171250308 @default.
- W2182252862 hasConceptScore W2182252862C172385210 @default.
- W2182252862 hasConceptScore W2182252862C191952053 @default.
- W2182252862 hasConceptScore W2182252862C192562407 @default.
- W2182252862 hasConceptScore W2182252862C195370968 @default.
- W2182252862 hasConceptScore W2182252862C2361726 @default.
- W2182252862 hasConceptScore W2182252862C25356406 @default.
- W2182252862 hasConceptScore W2182252862C2778413303 @default.
- W2182252862 hasConceptScore W2182252862C2779227376 @default.
- W2182252862 hasConceptScore W2182252862C2779283907 @default.
- W2182252862 hasConceptScore W2182252862C3792809 @default.
- W2182252862 hasConceptScore W2182252862C49040817 @default.
- W2182252862 hasConceptScore W2182252862C544956773 @default.
- W2182252862 hasConceptScore W2182252862C57863236 @default.
- W2182252862 hasLocation W21822528621 @default.
- W2182252862 hasOpenAccess W2182252862 @default.
- W2182252862 hasPrimaryLocation W21822528621 @default.
- W2182252862 hasRelatedWork W1497594418 @default.
- W2182252862 hasRelatedWork W1964105483 @default.
- W2182252862 hasRelatedWork W1987140210 @default.
- W2182252862 hasRelatedWork W1999751552 @default.
- W2182252862 hasRelatedWork W2000811179 @default.
- W2182252862 hasRelatedWork W2006492770 @default.
- W2182252862 hasRelatedWork W2020557063 @default.
- W2182252862 hasRelatedWork W2061832999 @default.
- W2182252862 hasRelatedWork W2064690483 @default.
- W2182252862 hasRelatedWork W2093296166 @default.
- W2182252862 hasRelatedWork W2107529859 @default.
- W2182252862 hasRelatedWork W2132070857 @default.
- W2182252862 hasRelatedWork W2284748294 @default.
- W2182252862 hasRelatedWork W2379481380 @default.
- W2182252862 hasRelatedWork W2609795244 @default.
- W2182252862 hasRelatedWork W2983994060 @default.
- W2182252862 hasRelatedWork W3169324064 @default.
- W2182252862 hasRelatedWork W2056361543 @default.
- W2182252862 hasRelatedWork W2402471804 @default.
- W2182252862 hasRelatedWork W2813044717 @default.
- W2182252862 isParatext "false" @default.
- W2182252862 isRetracted "false" @default.
- W2182252862 magId "2182252862" @default.
- W2182252862 workType "article" @default.