Matches in SemOpenAlex for { <https://semopenalex.org/work/W2183483313> ?p ?o ?g. }
- W2183483313 endingPage "1889" @default.
- W2183483313 startingPage "1876" @default.
- W2183483313 abstract "This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively." @default.
- W2183483313 created "2016-06-24" @default.
- W2183483313 creator A5005838892 @default.
- W2183483313 creator A5026793138 @default.
- W2183483313 creator A5083559157 @default.
- W2183483313 date "2015-12-02" @default.
- W2183483313 modified "2023-09-29" @default.
- W2183483313 title "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph" @default.
- W2183483313 cites W1528584926 @default.
- W2183483313 cites W1966130555 @default.
- W2183483313 cites W1996619393 @default.
- W2183483313 cites W1999184785 @default.
- W2183483313 cites W2015948644 @default.
- W2183483313 cites W2024199595 @default.
- W2183483313 cites W2026150159 @default.
- W2183483313 cites W2026361925 @default.
- W2183483313 cites W2043309648 @default.
- W2183483313 cites W2056473999 @default.
- W2183483313 cites W2057364757 @default.
- W2183483313 cites W2102382343 @default.
- W2183483313 cites W2105101786 @default.
- W2183483313 cites W2106519300 @default.
- W2183483313 cites W2114998400 @default.
- W2183483313 cites W2151643657 @default.
- W2183483313 cites W2162869577 @default.
- W2183483313 cites W2164723542 @default.
- W2183483313 cites W2166732668 @default.
- W2183483313 doi "https://doi.org/10.3390/mi6121460" @default.
- W2183483313 hasPublicationYear "2015" @default.
- W2183483313 type Work @default.
- W2183483313 sameAs 2183483313 @default.
- W2183483313 citedByCount "35" @default.
- W2183483313 countsByYear W21834833132016 @default.
- W2183483313 countsByYear W21834833132017 @default.
- W2183483313 countsByYear W21834833132018 @default.
- W2183483313 countsByYear W21834833132019 @default.
- W2183483313 countsByYear W21834833132020 @default.
- W2183483313 countsByYear W21834833132021 @default.
- W2183483313 countsByYear W21834833132022 @default.
- W2183483313 countsByYear W21834833132023 @default.
- W2183483313 crossrefType "journal-article" @default.
- W2183483313 hasAuthorship W2183483313A5005838892 @default.
- W2183483313 hasAuthorship W2183483313A5026793138 @default.
- W2183483313 hasAuthorship W2183483313A5083559157 @default.
- W2183483313 hasBestOaLocation W21834833131 @default.
- W2183483313 hasConcept C100460472 @default.
- W2183483313 hasConcept C107551265 @default.
- W2183483313 hasConcept C108439606 @default.
- W2183483313 hasConcept C119599485 @default.
- W2183483313 hasConcept C120665830 @default.
- W2183483313 hasConcept C121332964 @default.
- W2183483313 hasConcept C124634506 @default.
- W2183483313 hasConcept C127413603 @default.
- W2183483313 hasConcept C130472188 @default.
- W2183483313 hasConcept C132771110 @default.
- W2183483313 hasConcept C136872047 @default.
- W2183483313 hasConcept C15744967 @default.
- W2183483313 hasConcept C159985019 @default.
- W2183483313 hasConcept C165699331 @default.
- W2183483313 hasConcept C172707124 @default.
- W2183483313 hasConcept C192562407 @default.
- W2183483313 hasConcept C199524791 @default.
- W2183483313 hasConcept C24890656 @default.
- W2183483313 hasConcept C2778393539 @default.
- W2183483313 hasConcept C2779227376 @default.
- W2183483313 hasConcept C2779844322 @default.
- W2183483313 hasConcept C37977207 @default.
- W2183483313 hasConcept C49040817 @default.
- W2183483313 hasConcept C542102704 @default.
- W2183483313 hasConcept C78519656 @default.
- W2183483313 hasConceptScore W2183483313C100460472 @default.
- W2183483313 hasConceptScore W2183483313C107551265 @default.
- W2183483313 hasConceptScore W2183483313C108439606 @default.
- W2183483313 hasConceptScore W2183483313C119599485 @default.
- W2183483313 hasConceptScore W2183483313C120665830 @default.
- W2183483313 hasConceptScore W2183483313C121332964 @default.
- W2183483313 hasConceptScore W2183483313C124634506 @default.
- W2183483313 hasConceptScore W2183483313C127413603 @default.
- W2183483313 hasConceptScore W2183483313C130472188 @default.
- W2183483313 hasConceptScore W2183483313C132771110 @default.
- W2183483313 hasConceptScore W2183483313C136872047 @default.
- W2183483313 hasConceptScore W2183483313C15744967 @default.
- W2183483313 hasConceptScore W2183483313C159985019 @default.
- W2183483313 hasConceptScore W2183483313C165699331 @default.
- W2183483313 hasConceptScore W2183483313C172707124 @default.
- W2183483313 hasConceptScore W2183483313C192562407 @default.
- W2183483313 hasConceptScore W2183483313C199524791 @default.
- W2183483313 hasConceptScore W2183483313C24890656 @default.
- W2183483313 hasConceptScore W2183483313C2778393539 @default.
- W2183483313 hasConceptScore W2183483313C2779227376 @default.
- W2183483313 hasConceptScore W2183483313C2779844322 @default.
- W2183483313 hasConceptScore W2183483313C37977207 @default.
- W2183483313 hasConceptScore W2183483313C49040817 @default.
- W2183483313 hasConceptScore W2183483313C542102704 @default.
- W2183483313 hasConceptScore W2183483313C78519656 @default.
- W2183483313 hasFunder F4320310869 @default.
- W2183483313 hasIssue "12" @default.
- W2183483313 hasLocation W21834833131 @default.