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- W2183632825 abstract "We present a computationally efficient multi-energy domain coupled system-level model of an electrostatically actuated RF MEMS switch exposed to squeeze film damping. The physically-based model is systematically derived and calibrated on the basis of a hierarchical modeling approach. The model shows excellent agreement with measurements. Especially coupling effects, that are the increased damping and the spring softening whilst actuation, are correctly reproduced by the model. This demonstrates the power of our modeling approach and, in particular, the predictiveness w.r.t. ”real world” experiments. Furthermore, the automatically generated model is suitable for direct implementation into standard circuit simulators." @default.
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- W2183632825 date "2009-05-03" @default.
- W2183632825 modified "2023-09-25" @default.
- W2183632825 title "Automatically Generated and Experimentally Validated System-Level Model of a Microelectromechanical RF Switch" @default.
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