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- W2185451012 abstract "Amorphous and microcrystalline silicon carbon films (a-SiC:H, pcSiC:H) have been deposited using SiH4, CH4 and H2 mixed gas ECR plasmas. The optical bandgap of a-SiC:H films is not dependent on the hydrogen dilution in the ECR plasma. The deposition rate of aSiC:H films is found to be strongly dependent on the ECR magnetic field and the hydrogen dilution. The hydrogen dilution effect on the deposition rate indicates that the etching in ECR hydrogen plasmas plays an important role in the deposition of a-SiC:H films. Optical constants, n and k, of ECRdeposited a-SiC:H films in the wavelength region of 0.4 to 1.0 pm are determined to be 2.03 - 1.90 and 0.04 - 0.00, respectively. The micro-structures of ECRdeposited pc-SiC:H films are shown by xray diffraction and SEM to compose of 1000 A a-Sic microcrystallites and amorphous network structures." @default.
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- W2185451012 date "1990-01-01" @default.
- W2185451012 modified "2023-09-27" @default.
- W2185451012 title "SILICON CARBON ALLOY THIN FIM DEPOSITIONS USING ELECTRON CYCIDTRON RESONANCE MICROWAVE PLASMAS" @default.
- W2185451012 hasPublicationYear "1990" @default.
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