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• W2185578408 abstract "This paper presents and compares two capacitive hu- midity sensors with interdigitated electrodes for a portable clin- ical application. A polyimide-sensitive layer covers the first struc- tures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two struc- tures are compared. Suitability of optimized sensors for our appli- cation is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40 C by its heater, the response time is 200 ms and the total des- orption time is 11 s." @default.
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• W2185578408 date "2002-01-01" @default.
• W2185578408 modified "2023-09-27" @default.
• W2185578408 title "Interdigitated Humidity Sensors for a Portable" @default.
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