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- W2185758084 abstract "This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage -preconcentrator, a -column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. -column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by LabVIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng." @default.
- W2185758084 created "2016-06-24" @default.
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- W2185758084 date "2010-01-01" @default.
- W2185758084 modified "2023-09-24" @default.
- W2185758084 title "THE INTEGRATION AND EVALUATION OF A PROTOTYPE REAL-TIME MICRO GAS ANALYZER EMPLOYING MEMS BASED KEY COMPONENTS" @default.
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