Matches in SemOpenAlex for { <https://semopenalex.org/work/W2186083499> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2186083499 abstract "Non-contact, 3D optical interferometric profilers provide detailed topography measurements of super-smooth surfaces such as hard disk substrates and super-polished optics. However, the contribution of the interferometer system to the measurement can be significant for surfaces with an RMS roughness of one Angstrom and below. Special care must be taken to minimize random noise as well as to remove the systematic instrument error from the measured data. While the random noise can be addressed by low-noise design and averaging of measurements, the systematic instrument error is more difficult to eliminate. In this paper an interferometer configuration is presented that eliminates the mid to higher spatial frequencies from the reference beam. This configuration is called a virtual-reference interferometer, since there is no physical surface in focus conjugate to the test surface. This provides very smooth systematic instrument errors with essentially no contribution in the mid to high spatial frequencies of surface waviness and roughness. The virtual-reference interferometer has a midsize measurement area of 20x20 mm, is fully compensated for white light, extended source illumination, and enables data acquisition for both phase shifting and coherence scanning modes. Current performance data show a residual systematic tool waviness error of < 0.2 Angstrom RMS, with potential for improvement. Efficient stitching of subaperture measurements accommodates high resolution roughness and waviness maps of test surfaces up to 150 mm x100 mm." @default.
- W2186083499 created "2016-06-24" @default.
- W2186083499 creator A5048579456 @default.
- W2186083499 date "2012-01-01" @default.
- W2186083499 modified "2023-09-26" @default.
- W2186083499 title "Sub-Angstrom surface metrology with a virtual reference" @default.
- W2186083499 cites W1968669654 @default.
- W2186083499 cites W1986688891 @default.
- W2186083499 cites W2058929179 @default.
- W2186083499 cites W1553802528 @default.
- W2186083499 cites W1595251087 @default.
- W2186083499 hasPublicationYear "2012" @default.
- W2186083499 type Work @default.
- W2186083499 sameAs 2186083499 @default.
- W2186083499 citedByCount "0" @default.
- W2186083499 crossrefType "journal-article" @default.
- W2186083499 hasAuthorship W2186083499A5048579456 @default.
- W2186083499 hasConcept C107365816 @default.
- W2186083499 hasConcept C115961682 @default.
- W2186083499 hasConcept C120665830 @default.
- W2186083499 hasConcept C121332964 @default.
- W2186083499 hasConcept C154945302 @default.
- W2186083499 hasConcept C159985019 @default.
- W2186083499 hasConcept C166689943 @default.
- W2186083499 hasConcept C192562407 @default.
- W2186083499 hasConcept C195766429 @default.
- W2186083499 hasConcept C23576306 @default.
- W2186083499 hasConcept C2777701225 @default.
- W2186083499 hasConcept C29081049 @default.
- W2186083499 hasConcept C41008148 @default.
- W2186083499 hasConcept C71039073 @default.
- W2186083499 hasConcept C99498987 @default.
- W2186083499 hasConceptScore W2186083499C107365816 @default.
- W2186083499 hasConceptScore W2186083499C115961682 @default.
- W2186083499 hasConceptScore W2186083499C120665830 @default.
- W2186083499 hasConceptScore W2186083499C121332964 @default.
- W2186083499 hasConceptScore W2186083499C154945302 @default.
- W2186083499 hasConceptScore W2186083499C159985019 @default.
- W2186083499 hasConceptScore W2186083499C166689943 @default.
- W2186083499 hasConceptScore W2186083499C192562407 @default.
- W2186083499 hasConceptScore W2186083499C195766429 @default.
- W2186083499 hasConceptScore W2186083499C23576306 @default.
- W2186083499 hasConceptScore W2186083499C2777701225 @default.
- W2186083499 hasConceptScore W2186083499C29081049 @default.
- W2186083499 hasConceptScore W2186083499C41008148 @default.
- W2186083499 hasConceptScore W2186083499C71039073 @default.
- W2186083499 hasConceptScore W2186083499C99498987 @default.
- W2186083499 hasLocation W21860834991 @default.
- W2186083499 hasOpenAccess W2186083499 @default.
- W2186083499 hasPrimaryLocation W21860834991 @default.
- W2186083499 hasRelatedWork W1997209397 @default.
- W2186083499 hasRelatedWork W2016688315 @default.
- W2186083499 hasRelatedWork W2018815291 @default.
- W2186083499 hasRelatedWork W2022846771 @default.
- W2186083499 hasRelatedWork W2035959079 @default.
- W2186083499 hasRelatedWork W2045190022 @default.
- W2186083499 hasRelatedWork W2062674860 @default.
- W2186083499 hasRelatedWork W2077344347 @default.
- W2186083499 hasRelatedWork W2172065064 @default.
- W2186083499 hasRelatedWork W2270965269 @default.
- W2186083499 hasRelatedWork W2273315942 @default.
- W2186083499 hasRelatedWork W2757083218 @default.
- W2186083499 hasRelatedWork W2887873963 @default.
- W2186083499 hasRelatedWork W2897250612 @default.
- W2186083499 hasRelatedWork W2951496858 @default.
- W2186083499 hasRelatedWork W2967009169 @default.
- W2186083499 hasRelatedWork W2983002548 @default.
- W2186083499 hasRelatedWork W2986744391 @default.
- W2186083499 hasRelatedWork W3037913860 @default.
- W2186083499 hasRelatedWork W3186331605 @default.
- W2186083499 isParatext "false" @default.
- W2186083499 isRetracted "false" @default.
- W2186083499 magId "2186083499" @default.
- W2186083499 workType "article" @default.