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- W2186325835 abstract "This paper presents the state of the art in scanning force microscopy for dimensional metrology. A description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to im- prove calibration procedures, traceability, and reduce measurement uncertainty are described." @default.
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- W2186325835 date "2006-01-01" @default.
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- W2186325835 title "The Scanning Force Microscope as a measuring tool" @default.
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- W2186325835 hasPublicationYear "2006" @default.
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