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- W2186995502 abstract "Direct-write micromachining has been accomplished in fused silica, a preferred material for µTAS and biochemical applications. The unique manufacturing processes permit complex channel shapes and undercuts, as well as the monolithic inclusion of optical elements including waveguides, splitters, GRIN and physical lenses and prisms and couplers. Monolithically integrated spectrometers are also under development. The monolithic nature of these devices permits complex optofluidic devices to withstand harsh field conditions without loss of alignment." @default.
- W2186995502 created "2016-06-24" @default.
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- W2186995502 date "2008-01-01" @default.
- W2186995502 modified "2023-09-27" @default.
- W2186995502 title "FEMTOSECOND-LASER-BASED FUSED SILICA MICROMACHINING FOR µTAS" @default.
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