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- W2187257451 abstract "We present an actuated silicon-micromachined mi- cromirror with continuous and highly accurate position adjust- ment designed to be used in the construction of external-cavity semiconductor-laser modules. In our initial design, a positioning accuracy better than k0.2 pm for the actuated micromirrors is obtained. The mechanical robustness, small size, and fine- positional precision of the actuated micromirrors are sufficient for external-cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low because they are batch-processed." @default.
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- W2187257451 date "1996-01-01" @default.
- W2187257451 modified "2023-09-26" @default.
- W2187257451 title "Actuators with Integrated High-Precision for External-Cavity Semiconductor Lasers" @default.
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