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• W2187348957 abstract "Five of the most important performance specifications of a sensor are its sensitivity, linearity, frequency response, long-term stability and power consumption. Sensor sensitivity and linearity are important characteristics for high accuracy and high precision measuring systems. Environment, health, telecommunications and the automobile industries are driving research and development of further integrated multi-function and adaptive systems that feed on multifrequency information provided by sensors with smaller power consumptions. And in some specific environment and health applications, long–term stability measurements is one the most important specifications. Thin-film sensors are emerging as one of the most promising technologies for the manufacture of sensor blocks for those systems. These sensors are used in application-oriented systems, manufactured at smaller temperatures with reproductable and high-production techniques. Thin film sensors can also be integrated with post-signal processing CMOS technologies and consequently with low manufacturing and low maintenance cost systems. In the next section, the authors analyse the evolution of large area electronics gas sensors and focus on the breakthroughs of thin-film transistors (TFTs) based technologies. The general characteristics of thin-film transistor (TFT) technologies are presented in the following sections: the structure of TFTs, the physical and electrical properties of the materials used in TFTs and how those properties are affected by the manufacturing processes parameters. A physics description and models overview of the thin film transistor (TFT) is discussed in the fifth section. The next section presents the structure, materials and manufacturing processes of air-gap thin-film transistors. Test and characterisation results are also discussed in this section. Air-gap thin-film transistors working as gas sensors present high sensitivity values in the presence of specific molecules, which could lead to new developments. Conclusions based on the five performance characteristics of a sensor, mentioned in the beginning of this introduction are presented in the last section of this paper." @default.
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• W2187348957 date "2009-01-01" @default.
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• W2187348957 title "Thin Film Transistors Gas Sensors: Materials, Manufacturing Technologies and Test Results" @default.
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