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- W2187444589 abstract "Thispaper reports onthefeasibility study of usingso)gelleadzirconate titanate formonolithic microwave integrated circuit (MMIC)thinfilm capacitors. Thefilmsweremodeled asthinfilm microstrip lines (TFMS)andtheir microwave behaviour was simulated usinga commercially available electromagnetic simulator Sonnet. Thecapacitances were calculated forfilm thicknesses ranging from0.1-0.3pm andwithdielectric constant from100-1000overthe frequency rangeofI to100GHz.Inaddition, the characteristic impedances ofvarious TFMSlines were alsocalculated fordifferent linewidths. Fora 500 dielectric constant/I pm filmthickness structure, the width obtained fora50Q isless than1pm.Results of this study showthat theproposed sol-gel material canbe usedforefficient size reduction inMMIC." @default.
- W2187444589 created "2016-06-24" @default.
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- W2187444589 date "2005-01-01" @default.
- W2187444589 modified "2023-09-24" @default.
- W2187444589 title "Modeling andSimulation ofSol-Gel ThinFilmsforMonolithic Microwave Integrated Circuit Applications" @default.
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