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- W2187518014 abstract "We introduce a new thin film fabrication technique which uses a surface phonon mode substrate excited by surface acoustic waves (SAW) to control the morphology of very thin films. Permalloy films and Co- Cr-Ta films of 3001 thickness were prepared by d.c. magnetron sputtering onto LiNbO single crystal substrate excited by SAW. By 3scanning electron microscopy (SEM) and scanning tunneling microscopy (STM) observations, the structure of films was found to be drastically changed by SAW excitation as a function of excited amplitude. Especially at the critical excitation voltage, film structure consists of homogeneous grain form and very fine grain size is realized. In the CO-Cr-Ta sputtered films fabricated at this critical SAW excitation voltage of 8V, the value of Hc takes minimum value of about 5 Oe, which is 2 orders lower than that of the films fabricated without SAW excitation. In the MO-permalloy films fabricated at this voltage, stress free films are fabricated and excellent soft magnetic property are realized. As these results shows, a new thin film fabrication technique which uses substrates excited by SAW is a useful technique for controlling the morphology and magnetic properties of thin films. 1. INTRODUCTIOB In magnetic thin film devices such as magnetic recording media and the single-pole-type (SPT) head for perpendicular recording, very thin magnetic layers are normally used. In such very thin films, magnetic properties are strongly influenced by the inhomogeneity of the microstructure of the films, especially that induced at the initial stages of the film growth less than 501. Therefore, in order to realize the desired microstructures of thin magnetic films to obtain their best magnetic properties, the development of suitable film fabrication control system is required. In the present study, we introduce a new thin film fabrication technique which uses a substrate excited by surface acoustic waves (SAW). We report on the effect of SAW excitation on film growth and the morphology of the films is examined in connection with the change of their magnetic properties." @default.
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- W2187518014 date "1990-01-01" @default.
- W2187518014 modified "2023-09-25" @default.
- W2187518014 title "NEW THIB FXU4 FABRICATIOB TECHBIQUE USING A SU%STRATE EXCITED BY SAW" @default.
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