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- W2187651891 abstract "The effect of underlayer texture on Cu film properties and electronxgration performance in Cu damascene interconnects have been studied. The Cu film orientation depends strongly on the underlayer texture. The Cu orientation can be controlled by changing the preferred orientation of the TiN underlayer that has the same cubic structure as the Cu. The Cu film deposited on highly 41 l>-oriented TiN underlayer indicates a strong orientation. The atomic arrangement between Cu (1 11) and TiN (1 11) planes has a rotational angle within +lo around the axis in spite of lattice mismatch of 14.7%. In the case of damascene interconnects, sidewalls in a trench affect Cu texture and the dependence of the underlayer texture on the Cu film orientation becomes small as line width decreases. EM performance, however, has been improved by the realization of Cu damascene interconnects with a strong 4 11> orientation. ~NT~~D~CTI~~" @default.
- W2187651891 created "2016-06-24" @default.
- W2187651891 creator A5024288259 @default.
- W2187651891 creator A5045611233 @default.
- W2187651891 creator A5091554050 @default.
- W2187651891 date "1998-01-01" @default.
- W2187651891 modified "2023-09-22" @default.
- W2187651891 title "§et! terconnects with Crystallographic Texture Control and its Electromigration Performance" @default.
- W2187651891 cites W1973947465 @default.
- W2187651891 cites W2046109232 @default.
- W2187651891 cites W2057482699 @default.
- W2187651891 cites W2061841184 @default.
- W2187651891 cites W2138143140 @default.
- W2187651891 cites W2152029726 @default.
- W2187651891 cites W2169210795 @default.
- W2187651891 cites W2143042017 @default.
- W2187651891 hasPublicationYear "1998" @default.
- W2187651891 type Work @default.
- W2187651891 sameAs 2187651891 @default.
- W2187651891 citedByCount "0" @default.
- W2187651891 crossrefType "journal-article" @default.
- W2187651891 hasAuthorship W2187651891A5024288259 @default.
- W2187651891 hasAuthorship W2187651891A5045611233 @default.
- W2187651891 hasAuthorship W2187651891A5091554050 @default.
- W2187651891 hasConcept C115961682 @default.
- W2187651891 hasConcept C116372231 @default.
- W2187651891 hasConcept C120665830 @default.
- W2187651891 hasConcept C121332964 @default.
- W2187651891 hasConcept C138055206 @default.
- W2187651891 hasConcept C154945302 @default.
- W2187651891 hasConcept C155310634 @default.
- W2187651891 hasConcept C159985019 @default.
- W2187651891 hasConcept C16345878 @default.
- W2187651891 hasConcept C185592680 @default.
- W2187651891 hasConcept C191897082 @default.
- W2187651891 hasConcept C192562407 @default.
- W2187651891 hasConcept C2524010 @default.
- W2187651891 hasConcept C2777346912 @default.
- W2187651891 hasConcept C2779227376 @default.
- W2187651891 hasConcept C2781195486 @default.
- W2187651891 hasConcept C33923547 @default.
- W2187651891 hasConcept C41008148 @default.
- W2187651891 hasConcept C525849907 @default.
- W2187651891 hasConcept C544778455 @default.
- W2187651891 hasConcept C8010536 @default.
- W2187651891 hasConcept C85725439 @default.
- W2187651891 hasConcept C87976508 @default.
- W2187651891 hasConceptScore W2187651891C115961682 @default.
- W2187651891 hasConceptScore W2187651891C116372231 @default.
- W2187651891 hasConceptScore W2187651891C120665830 @default.
- W2187651891 hasConceptScore W2187651891C121332964 @default.
- W2187651891 hasConceptScore W2187651891C138055206 @default.
- W2187651891 hasConceptScore W2187651891C154945302 @default.
- W2187651891 hasConceptScore W2187651891C155310634 @default.
- W2187651891 hasConceptScore W2187651891C159985019 @default.
- W2187651891 hasConceptScore W2187651891C16345878 @default.
- W2187651891 hasConceptScore W2187651891C185592680 @default.
- W2187651891 hasConceptScore W2187651891C191897082 @default.
- W2187651891 hasConceptScore W2187651891C192562407 @default.
- W2187651891 hasConceptScore W2187651891C2524010 @default.
- W2187651891 hasConceptScore W2187651891C2777346912 @default.
- W2187651891 hasConceptScore W2187651891C2779227376 @default.
- W2187651891 hasConceptScore W2187651891C2781195486 @default.
- W2187651891 hasConceptScore W2187651891C33923547 @default.
- W2187651891 hasConceptScore W2187651891C41008148 @default.
- W2187651891 hasConceptScore W2187651891C525849907 @default.
- W2187651891 hasConceptScore W2187651891C544778455 @default.
- W2187651891 hasConceptScore W2187651891C8010536 @default.
- W2187651891 hasConceptScore W2187651891C85725439 @default.
- W2187651891 hasConceptScore W2187651891C87976508 @default.
- W2187651891 hasLocation W21876518911 @default.
- W2187651891 hasOpenAccess W2187651891 @default.
- W2187651891 hasPrimaryLocation W21876518911 @default.
- W2187651891 hasRelatedWork W1553943304 @default.
- W2187651891 hasRelatedWork W1973370121 @default.
- W2187651891 hasRelatedWork W1977753326 @default.
- W2187651891 hasRelatedWork W1998472499 @default.
- W2187651891 hasRelatedWork W2001814968 @default.
- W2187651891 hasRelatedWork W2011124911 @default.
- W2187651891 hasRelatedWork W2015929920 @default.
- W2187651891 hasRelatedWork W2019915545 @default.
- W2187651891 hasRelatedWork W2049459006 @default.
- W2187651891 hasRelatedWork W2054502920 @default.
- W2187651891 hasRelatedWork W2072686007 @default.
- W2187651891 hasRelatedWork W2165639568 @default.
- W2187651891 hasRelatedWork W2251512481 @default.
- W2187651891 hasRelatedWork W2274087303 @default.
- W2187651891 hasRelatedWork W2322246847 @default.
- W2187651891 hasRelatedWork W2331621354 @default.
- W2187651891 hasRelatedWork W2348993537 @default.
- W2187651891 hasRelatedWork W2465010713 @default.
- W2187651891 hasRelatedWork W2955398832 @default.
- W2187651891 hasRelatedWork W573929708 @default.
- W2187651891 isParatext "false" @default.
- W2187651891 isRetracted "false" @default.
- W2187651891 magId "2187651891" @default.
- W2187651891 workType "article" @default.