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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2188054504> ?p ?o ?g. }

• W2188054504 abstract "We report, for the first time, the design and fabrication of a bottom-drive, rotary, variable-capacitance micromotor supported on microball bearings. The rotor and stator of the 6-phase micromotor were designed based on 3D finite element analysis. The rotary micromotor is expected to produce 3 μNm of torque at 100 V. Different designs were successfully fabricated using a 9-level-mask process. The rotary micromotor is a platform for developing centrifugal micropumps for fuel delivery applications." @default.
• W2188054504 created "2016-06-24" @default.
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• W2188054504 date "2006-01-01" @default.
• W2188054504 modified "2023-09-27" @default.
• W2188054504 title "Design and Fabrication of a Rotary Electrostatic Micromotor Supported on Microball Bearings" @default.
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• W2188054504 hasPublicationYear "2006" @default.
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