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- W2188195452 abstract "Modelling studies of the plasma chemistry prevailing in CH yH yAr mixtures in a DC arc jet reactor used for diamond 42 chemical vapour deposition are reported, together with complementary new experimental data.Gas temperatures, T , close to gas the substrate have been determined via analysis of the measured rotational state population distribution in C (a) radicals and 2 found to be ;3200 K—similar to the temperature established previously in the free plume region.These, and previous (J.Appl. Phys.92 (2002) 4213), T and number density measurements are in good accord with the first results from a full 2D (r, z) gas modelling of the plasma chemical transformations and heat and mass transfer processes within the evolving plume and the periphery of the reaction chamber.The modelling shows formation of a shock front in the supersonic expansion, a few millimeters downstream from the nozzle exit.The spatial distributions of the various species number densities are predicted to display localised maxima and minima within the reaction chamber, reflecting the complex balance between gas flow, diffusive transfer and chemical transformations in the widely varying range of local conditions (notably T and the H and H concentrations). gas 2 The calculations provide clear evidence of the importance of gas flow re-circulation in transporting the hydrocarbon feedstock gas (methane) from the injection ring to the hot plume.C H , C H, C, CH, C and C species are all predicted to be present at 22 2 2 3 number densities )5=10 cm in the plume incident on the substrate; it is suggested that all of the major C containing radical 12 y3" @default.
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- W2188195452 date "2004-01-01" @default.
- W2188195452 modified "2023-09-27" @default.
- W2188195452 title "distributions in a DC arc jet used for diamond chemical vapour deposition" @default.
- W2188195452 hasPublicationYear "2004" @default.
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