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- W2188454003 abstract "GaPN thin films were deposited on Silicon (100) substrates, in the range of 420-520 C by r-f sputtering employing a nitrogen–argon atmosphere. Energy dispersive x- ray spectroscopy revealed the presence of oxygen in the films, which presumably was incorporated from the background pressure in the deposition chamber, or from the gases employed. X-ray diffraction measurements indicate a preferential orientation of the GaPN films along the [111] direction, and the formation of a GaxOy compound. The Raman spectroscopy measurements showed presence of N atoms in the films. The Raman signals associated to gallium oxides, and Ga(PO3)3 were also identified. The films presented peaks in the photoluminescence spectra at 15 K associated to GaPN, and to a Ga oxide compound." @default.
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- W2188454003 date "2012-02-12" @default.
- W2188454003 modified "2023-09-27" @default.
- W2188454003 title "Structural and Optical Properties of GaPN Thin Films Grown by Magnetron Sputtering" @default.
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