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- W2188625645 abstract "A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. The deflection of the sensor is calculated both by simulation and theoretical model and it has been shown that the results of the simulations have acceptable values compared to the theoretical ones. Simulation models have also been designed to solve the resonating issue of the membrane for measuring the AC electric fields. It has been shown that by adding perforations to the surface of the membrane, it is possible to reduce the mass of membrane and still have similar electrostatic force on the membrane. Therefore, it is possible to reduce the damping due to air resistance in membrane movement when measuring AC fields." @default.
- W2188625645 created "2016-06-24" @default.
- W2188625645 creator A5015673618 @default.
- W2188625645 creator A5024818901 @default.
- W2188625645 date "2013-01-01" @default.
- W2188625645 modified "2023-09-27" @default.
- W2188625645 title "Metal MEMS Membrane Based Electric Field Sensor" @default.
- W2188625645 cites W1968574432 @default.
- W2188625645 cites W1974101084 @default.
- W2188625645 cites W2023045540 @default.
- W2188625645 cites W2097230138 @default.
- W2188625645 cites W593084883 @default.
- W2188625645 hasPublicationYear "2013" @default.
- W2188625645 type Work @default.
- W2188625645 sameAs 2188625645 @default.
- W2188625645 citedByCount "0" @default.
- W2188625645 crossrefType "journal-article" @default.
- W2188625645 hasAuthorship W2188625645A5015673618 @default.
- W2188625645 hasAuthorship W2188625645A5024818901 @default.
- W2188625645 hasConcept C117626034 @default.
- W2188625645 hasConcept C119599485 @default.
- W2188625645 hasConcept C121332964 @default.
- W2188625645 hasConcept C127413603 @default.
- W2188625645 hasConcept C185592680 @default.
- W2188625645 hasConcept C192562407 @default.
- W2188625645 hasConcept C206755178 @default.
- W2188625645 hasConcept C24890656 @default.
- W2188625645 hasConcept C2781355719 @default.
- W2188625645 hasConcept C37977207 @default.
- W2188625645 hasConcept C41625074 @default.
- W2188625645 hasConcept C49040817 @default.
- W2188625645 hasConcept C55493867 @default.
- W2188625645 hasConcept C60799052 @default.
- W2188625645 hasConcept C62520636 @default.
- W2188625645 hasConcept C74650414 @default.
- W2188625645 hasConceptScore W2188625645C117626034 @default.
- W2188625645 hasConceptScore W2188625645C119599485 @default.
- W2188625645 hasConceptScore W2188625645C121332964 @default.
- W2188625645 hasConceptScore W2188625645C127413603 @default.
- W2188625645 hasConceptScore W2188625645C185592680 @default.
- W2188625645 hasConceptScore W2188625645C192562407 @default.
- W2188625645 hasConceptScore W2188625645C206755178 @default.
- W2188625645 hasConceptScore W2188625645C24890656 @default.
- W2188625645 hasConceptScore W2188625645C2781355719 @default.
- W2188625645 hasConceptScore W2188625645C37977207 @default.
- W2188625645 hasConceptScore W2188625645C41625074 @default.
- W2188625645 hasConceptScore W2188625645C49040817 @default.
- W2188625645 hasConceptScore W2188625645C55493867 @default.
- W2188625645 hasConceptScore W2188625645C60799052 @default.
- W2188625645 hasConceptScore W2188625645C62520636 @default.
- W2188625645 hasConceptScore W2188625645C74650414 @default.
- W2188625645 hasLocation W21886256451 @default.
- W2188625645 hasOpenAccess W2188625645 @default.
- W2188625645 hasPrimaryLocation W21886256451 @default.
- W2188625645 hasRelatedWork W1639173895 @default.
- W2188625645 hasRelatedWork W1866306307 @default.
- W2188625645 hasRelatedWork W1964648988 @default.
- W2188625645 hasRelatedWork W2011305857 @default.
- W2188625645 hasRelatedWork W2049112391 @default.
- W2188625645 hasRelatedWork W2056483849 @default.
- W2188625645 hasRelatedWork W2098692563 @default.
- W2188625645 hasRelatedWork W2130115599 @default.
- W2188625645 hasRelatedWork W2328635900 @default.
- W2188625645 hasRelatedWork W2333810935 @default.
- W2188625645 hasRelatedWork W2337898352 @default.
- W2188625645 hasRelatedWork W2347932286 @default.
- W2188625645 hasRelatedWork W2355519826 @default.
- W2188625645 hasRelatedWork W2741291743 @default.
- W2188625645 hasRelatedWork W2769493751 @default.
- W2188625645 hasRelatedWork W2789051977 @default.
- W2188625645 hasRelatedWork W2968845628 @default.
- W2188625645 hasRelatedWork W2972197354 @default.
- W2188625645 hasRelatedWork W3108730054 @default.
- W2188625645 hasRelatedWork W2825805392 @default.
- W2188625645 isParatext "false" @default.
- W2188625645 isRetracted "false" @default.
- W2188625645 magId "2188625645" @default.
- W2188625645 workType "article" @default.