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- W2188681303 abstract "Thispaperreports RF MEMS switch thathaslowactuation voltage andhighisolation characteristics. We proposesee-sawtypeRF MEMS switchbasedon a single crystalline silicon structure withfinegapvertical comb. Low voltageactuation and highisolation characteristics arekeyfeatures tobesolved in electrostatic RF switchdesign. Sincethese parameters intheconventional parallel plate MEMS switch design areintrade-off relation, both requirements cannot be met simultaneously. In vertical comb design, however, theactuation voltage isindependent to thevertical separation distance betweenthe contactelectrodes. Then,we candesign the largeseparation distance betweencontact electrodes to gethighisolation. We have designed andfabricated a RF MEMS switch whichhas-46dBisolation loss at5GHz,-0.9dB insertion lossat 5GHz and 40V operation voltage." @default.
- W2188681303 created "2016-06-24" @default.
- W2188681303 creator A5032365993 @default.
- W2188681303 date "2006-01-01" @default.
- W2188681303 modified "2023-09-25" @default.
- W2188681303 title "See-saw TypeRFMEMS Switch withFineGapVertical Comb" @default.
- W2188681303 cites W2040715616 @default.
- W2188681303 hasPublicationYear "2006" @default.
- W2188681303 type Work @default.
- W2188681303 sameAs 2188681303 @default.
- W2188681303 citedByCount "0" @default.
- W2188681303 crossrefType "journal-article" @default.
- W2188681303 hasAuthorship W2188681303A5032365993 @default.
- W2188681303 hasConcept C119599485 @default.
- W2188681303 hasConcept C121332964 @default.
- W2188681303 hasConcept C127413603 @default.
- W2188681303 hasConcept C136525101 @default.
- W2188681303 hasConcept C142724271 @default.
- W2188681303 hasConcept C155840801 @default.
- W2188681303 hasConcept C165801399 @default.
- W2188681303 hasConcept C17525397 @default.
- W2188681303 hasConcept C192562407 @default.
- W2188681303 hasConcept C204787440 @default.
- W2188681303 hasConcept C37977207 @default.
- W2188681303 hasConcept C49040817 @default.
- W2188681303 hasConcept C544956773 @default.
- W2188681303 hasConcept C62520636 @default.
- W2188681303 hasConcept C71924100 @default.
- W2188681303 hasConcept C74064498 @default.
- W2188681303 hasConcept C90327742 @default.
- W2188681303 hasConceptScore W2188681303C119599485 @default.
- W2188681303 hasConceptScore W2188681303C121332964 @default.
- W2188681303 hasConceptScore W2188681303C127413603 @default.
- W2188681303 hasConceptScore W2188681303C136525101 @default.
- W2188681303 hasConceptScore W2188681303C142724271 @default.
- W2188681303 hasConceptScore W2188681303C155840801 @default.
- W2188681303 hasConceptScore W2188681303C165801399 @default.
- W2188681303 hasConceptScore W2188681303C17525397 @default.
- W2188681303 hasConceptScore W2188681303C192562407 @default.
- W2188681303 hasConceptScore W2188681303C204787440 @default.
- W2188681303 hasConceptScore W2188681303C37977207 @default.
- W2188681303 hasConceptScore W2188681303C49040817 @default.
- W2188681303 hasConceptScore W2188681303C544956773 @default.
- W2188681303 hasConceptScore W2188681303C62520636 @default.
- W2188681303 hasConceptScore W2188681303C71924100 @default.
- W2188681303 hasConceptScore W2188681303C74064498 @default.
- W2188681303 hasConceptScore W2188681303C90327742 @default.
- W2188681303 hasLocation W21886813031 @default.
- W2188681303 hasOpenAccess W2188681303 @default.
- W2188681303 hasPrimaryLocation W21886813031 @default.
- W2188681303 hasRelatedWork W1996234925 @default.
- W2188681303 hasRelatedWork W2005665093 @default.
- W2188681303 hasRelatedWork W2009601729 @default.
- W2188681303 hasRelatedWork W2010670612 @default.
- W2188681303 hasRelatedWork W2031449587 @default.
- W2188681303 hasRelatedWork W2085382089 @default.
- W2188681303 hasRelatedWork W2131219373 @default.
- W2188681303 hasRelatedWork W2165490585 @default.
- W2188681303 hasRelatedWork W2234429980 @default.
- W2188681303 hasRelatedWork W2291362017 @default.
- W2188681303 hasRelatedWork W2351910398 @default.
- W2188681303 hasRelatedWork W2378689312 @default.
- W2188681303 hasRelatedWork W2380170000 @default.
- W2188681303 hasRelatedWork W2383196614 @default.
- W2188681303 hasRelatedWork W2401970810 @default.
- W2188681303 hasRelatedWork W2603080158 @default.
- W2188681303 hasRelatedWork W2739468397 @default.
- W2188681303 hasRelatedWork W2906650122 @default.
- W2188681303 hasRelatedWork W2997983264 @default.
- W2188681303 hasRelatedWork W3157026195 @default.
- W2188681303 isParatext "false" @default.
- W2188681303 isRetracted "false" @default.
- W2188681303 magId "2188681303" @default.
- W2188681303 workType "article" @default.