Matches in SemOpenAlex for { <https://semopenalex.org/work/W2189047300> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2189047300 abstract "(PZT)piezoelectric material. Thegrowth ofthickPZT filmisfacilitated byaerosol deposition method whichemploys ultra highspeedsprayofaerosol flowontothe designated substrate. Ina 30x30mm2 area,themaximum deposition rateisabout3.2gm/min. Thewiderangeofthefilm thickness from2,umto100,umcanbeeasily controlled. Tobe distinguished fromothermethods, thehigh-aspect-ratio PZT microstructures withthepattern higher than30,umcanbe achieved by usingour aerosoldeposition method.The piezoelectric properties areoptimized after annealing thePZT filmat500'C.Thedeveloped technique ofPZT thick-film deposition willstimulate breakthroughs inthedesignand applications ofmicro-actuators andmicro-transducers." @default.
- W2189047300 created "2016-06-24" @default.
- W2189047300 creator A5019365295 @default.
- W2189047300 creator A5030993240 @default.
- W2189047300 creator A5063518100 @default.
- W2189047300 date "2006-01-01" @default.
- W2189047300 modified "2023-09-26" @default.
- W2189047300 title "Microfabrication Process ofPZTThick Film byAerosol Deposition Method" @default.
- W2189047300 hasPublicationYear "2006" @default.
- W2189047300 type Work @default.
- W2189047300 sameAs 2189047300 @default.
- W2189047300 citedByCount "0" @default.
- W2189047300 crossrefType "journal-article" @default.
- W2189047300 hasAuthorship W2189047300A5019365295 @default.
- W2189047300 hasAuthorship W2189047300A5030993240 @default.
- W2189047300 hasAuthorship W2189047300A5063518100 @default.
- W2189047300 hasConcept C100082104 @default.
- W2189047300 hasConcept C111368507 @default.
- W2189047300 hasConcept C119599485 @default.
- W2189047300 hasConcept C127313418 @default.
- W2189047300 hasConcept C127413603 @default.
- W2189047300 hasConcept C136525101 @default.
- W2189047300 hasConcept C142724271 @default.
- W2189047300 hasConcept C151730666 @default.
- W2189047300 hasConcept C159985019 @default.
- W2189047300 hasConcept C171250308 @default.
- W2189047300 hasConcept C172707124 @default.
- W2189047300 hasConcept C191897082 @default.
- W2189047300 hasConcept C192562407 @default.
- W2189047300 hasConcept C204787440 @default.
- W2189047300 hasConcept C2777289219 @default.
- W2189047300 hasConcept C2777855556 @default.
- W2189047300 hasConcept C2816523 @default.
- W2189047300 hasConcept C49040817 @default.
- W2189047300 hasConcept C527607 @default.
- W2189047300 hasConcept C64297162 @default.
- W2189047300 hasConcept C71924100 @default.
- W2189047300 hasConcept C86803240 @default.
- W2189047300 hasConcept C87976508 @default.
- W2189047300 hasConceptScore W2189047300C100082104 @default.
- W2189047300 hasConceptScore W2189047300C111368507 @default.
- W2189047300 hasConceptScore W2189047300C119599485 @default.
- W2189047300 hasConceptScore W2189047300C127313418 @default.
- W2189047300 hasConceptScore W2189047300C127413603 @default.
- W2189047300 hasConceptScore W2189047300C136525101 @default.
- W2189047300 hasConceptScore W2189047300C142724271 @default.
- W2189047300 hasConceptScore W2189047300C151730666 @default.
- W2189047300 hasConceptScore W2189047300C159985019 @default.
- W2189047300 hasConceptScore W2189047300C171250308 @default.
- W2189047300 hasConceptScore W2189047300C172707124 @default.
- W2189047300 hasConceptScore W2189047300C191897082 @default.
- W2189047300 hasConceptScore W2189047300C192562407 @default.
- W2189047300 hasConceptScore W2189047300C204787440 @default.
- W2189047300 hasConceptScore W2189047300C2777289219 @default.
- W2189047300 hasConceptScore W2189047300C2777855556 @default.
- W2189047300 hasConceptScore W2189047300C2816523 @default.
- W2189047300 hasConceptScore W2189047300C49040817 @default.
- W2189047300 hasConceptScore W2189047300C527607 @default.
- W2189047300 hasConceptScore W2189047300C64297162 @default.
- W2189047300 hasConceptScore W2189047300C71924100 @default.
- W2189047300 hasConceptScore W2189047300C86803240 @default.
- W2189047300 hasConceptScore W2189047300C87976508 @default.
- W2189047300 hasLocation W21890473001 @default.
- W2189047300 hasOpenAccess W2189047300 @default.
- W2189047300 hasPrimaryLocation W21890473001 @default.
- W2189047300 hasRelatedWork W1909615254 @default.
- W2189047300 hasRelatedWork W1963575191 @default.
- W2189047300 hasRelatedWork W1968874946 @default.
- W2189047300 hasRelatedWork W1970718347 @default.
- W2189047300 hasRelatedWork W1997330261 @default.
- W2189047300 hasRelatedWork W2007210755 @default.
- W2189047300 hasRelatedWork W2018613061 @default.
- W2189047300 hasRelatedWork W2021888838 @default.
- W2189047300 hasRelatedWork W2036869856 @default.
- W2189047300 hasRelatedWork W2056040496 @default.
- W2189047300 hasRelatedWork W2154523289 @default.
- W2189047300 hasRelatedWork W2184133402 @default.
- W2189047300 hasRelatedWork W2291793299 @default.
- W2189047300 hasRelatedWork W2526329025 @default.
- W2189047300 hasRelatedWork W2631163356 @default.
- W2189047300 hasRelatedWork W2750076224 @default.
- W2189047300 hasRelatedWork W2754741700 @default.
- W2189047300 hasRelatedWork W2769258058 @default.
- W2189047300 hasRelatedWork W2895884130 @default.
- W2189047300 hasRelatedWork W2077172939 @default.
- W2189047300 isParatext "false" @default.
- W2189047300 isRetracted "false" @default.
- W2189047300 magId "2189047300" @default.
- W2189047300 workType "article" @default.