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- W2189090040 abstract "This paper demonstrates a new approach to electrostatic drive and detection of bulk acoustic resonators in which the electrode-gaps are filled with a high dielectric constant material. Internal electrostatic transduction has much higher efficiency than air-gap electrostatic transduction for bulk-mode resonators, which results in improved electrical performance. As a proof-of-concept, we demonstrate this phenomenon by electrostatic actuation of a 1.9GHz AlN (N ~ 9) film bulk acoustic resonator (FBAR)." @default.
- W2189090040 created "2016-06-24" @default.
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- W2189090040 date "2004-06-06" @default.
- W2189090040 modified "2023-09-26" @default.
- W2189090040 title "INTERNAL ELECTROSTATIC TRANSDUCTION FOR BULK-MODE MEMS RESONATORS" @default.
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- W2189090040 doi "https://doi.org/10.31438/trf.hh2004.15" @default.
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