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- W2189166661 abstract "Heavily doped by nitrogen single crystals of 6H-SiC were completely transformed into 3C-SiC ones by annealing in vacuum at presence of Si vapor for 1 hour at 2180 K or 4 hours at 2080 K. Mechanism of solid-to-solid transformation have been studied. Calculated nitrogen concentration from the Hall effect and EPR spectra for transformed crystals show its decreasing value in 3C-SiC. Data show appearance of new defects n donors and acceptors n that make nitrogen optically and electrically non-active. These defects accompany the process of transformation." @default.
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- W2189166661 date "2002-06-25" @default.
- W2189166661 modified "2023-10-18" @default.
- W2189166661 title "Mechanism of 6H-3C transformation in SiC" @default.
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- W2189166661 doi "https://doi.org/10.15407/spqeo5.02.152" @default.
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