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- W2189263863 abstract "We report a high rate GaAs etch process for the formation of backside vias using a BCl 3 / Cl 2 chemistry in an inductively coupled plasma (ICP). Through a combination of process and hardware development a maximum GaAs etch rate of 6.9 um/min was achieved. The effect of a number of process parameters on GaAs etch rate was explored through the use of designed experiments. These experiments were centered around a 6.1 um/min process and examined the effect of • Pressure • Process Gas Composition • Substrate Bias Power and • ICP Power on the GaAs etch rate and GaAs:Resist etch selectivity . The center point process was further verified in a manufacturing environment during an extended process marathon on 150 mm mounted and thinned substrates. Process results from the marathon are also reported." @default.
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- W2189263863 date "2002-01-01" @default.
- W2189263863 modified "2023-09-23" @default.
- W2189263863 title "Characterization of a Manufacturable High Rate GaAs Via Etch Process" @default.
- W2189263863 hasPublicationYear "2002" @default.
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