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- W2189490954 abstract "A 3D model of an electrostatically actuated micro cantilever has been developed for characterization using the finite element method (FEM). The microcantilever has an AlGaN/GaN HFET embedded on its base. Through various FEM simulations we are able to determine its operating frequency, electrostatic response, and strains about the AlGaN/GaN interface. This simulated cantilever system is more complex than most because it incorporates very thin subdomains. Since there is such a large difference in scale between the cantilever and the thin films, mapped and swept meshing is used heavily to reduce memory requirements and computation time. The complex, asymmetric top geometry of this structure makes 3D FEM simulation more desirable over standard PDE based analysis." @default.
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- W2189490954 date "2010-01-01" @default.
- W2189490954 modified "2023-09-23" @default.
- W2189490954 title "Characterization of an AlGaN/GaN Electrostatically Actuated Cantilever using Finite Element Method" @default.
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