Matches in SemOpenAlex for { <https://semopenalex.org/work/W2189597502> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W2189597502 abstract "MEMS (Micro Electro Mechanical Systems) havebeenfabricated usingadvanced micromachining basedonanextended semiconductor microfabrication. Sophisticated MEMS device usedasa high performance rotating gyroscope fornavigation control systems wasdeveloped. A 1.5mm diameter silicon ring rotor iselectrostaticall y levitated androtated at75,000rpm using highspeeddigital signal control. Two-axes rotation andthree-axes acceleration aredetected simultaneously withhighprecision. Small sizepackaged MEMSdevices suchasintegrated capacitive pressure sensor, diaphragm vacuum sensor andMEMS relay forLSItester havebeenfabricated using awafer level packaging using aglass withelectrical feedthroughs. TheMEMS relay performs highfrequency response upto20GHzandhigh reliability owingtothehermetic sealing. Active catheters, fine bloodpressure sensors usedinablood vessel andendoscope withlaser therapy function havebeendeveloped forminimal invasive medicine using MEMS basedassembly. AsNEMS (NanoElectro Mechanical Systems) whichinclude nanostructure, arrayed systems as multiprobe datastorage andmassively parallel electron beamlithography system havebeendeveloped using aglass withhighdensity electrical feedthroughs. Monolithic XYZ-stage hasbeenalsodeveloped forthearrayed systems. Highly sensitive cantilever resonator andmicroprobes havebeenalso developed astheNEMS. Biography Masayoshi Esashi received theB.E.degree inelectronic engineering in1971andtheDoctor of Engineering degree in1976atTohokuUniversity. Heserved asaresearch associate from1976andan associate professor from1981. Since1990hehasbeenaprofessor andheisnowthedirector of Micro/nanomachining" @default.
- W2189597502 created "2016-06-24" @default.
- W2189597502 creator A5055348625 @default.
- W2189597502 date "2007-01-01" @default.
- W2189597502 modified "2023-09-24" @default.
- W2189597502 title "WorkshopSpeech: Commercialization ofMEMS/NEMSinTohokuUniversity OpenCollaboration" @default.
- W2189597502 hasPublicationYear "2007" @default.
- W2189597502 type Work @default.
- W2189597502 sameAs 2189597502 @default.
- W2189597502 citedByCount "0" @default.
- W2189597502 crossrefType "journal-article" @default.
- W2189597502 hasAuthorship W2189597502A5055348625 @default.
- W2189597502 hasConcept C119599485 @default.
- W2189597502 hasConcept C127413603 @default.
- W2189597502 hasConcept C136525101 @default.
- W2189597502 hasConcept C141354745 @default.
- W2189597502 hasConcept C142724271 @default.
- W2189597502 hasConcept C145667562 @default.
- W2189597502 hasConcept C146978453 @default.
- W2189597502 hasConcept C157138929 @default.
- W2189597502 hasConcept C158488048 @default.
- W2189597502 hasConcept C159985019 @default.
- W2189597502 hasConcept C164292776 @default.
- W2189597502 hasConcept C192562407 @default.
- W2189597502 hasConcept C204787440 @default.
- W2189597502 hasConcept C206755178 @default.
- W2189597502 hasConcept C37977207 @default.
- W2189597502 hasConcept C49040817 @default.
- W2189597502 hasConcept C527607 @default.
- W2189597502 hasConcept C71924100 @default.
- W2189597502 hasConcept C78519656 @default.
- W2189597502 hasConcept C97126364 @default.
- W2189597502 hasConceptScore W2189597502C119599485 @default.
- W2189597502 hasConceptScore W2189597502C127413603 @default.
- W2189597502 hasConceptScore W2189597502C136525101 @default.
- W2189597502 hasConceptScore W2189597502C141354745 @default.
- W2189597502 hasConceptScore W2189597502C142724271 @default.
- W2189597502 hasConceptScore W2189597502C145667562 @default.
- W2189597502 hasConceptScore W2189597502C146978453 @default.
- W2189597502 hasConceptScore W2189597502C157138929 @default.
- W2189597502 hasConceptScore W2189597502C158488048 @default.
- W2189597502 hasConceptScore W2189597502C159985019 @default.
- W2189597502 hasConceptScore W2189597502C164292776 @default.
- W2189597502 hasConceptScore W2189597502C192562407 @default.
- W2189597502 hasConceptScore W2189597502C204787440 @default.
- W2189597502 hasConceptScore W2189597502C206755178 @default.
- W2189597502 hasConceptScore W2189597502C37977207 @default.
- W2189597502 hasConceptScore W2189597502C49040817 @default.
- W2189597502 hasConceptScore W2189597502C527607 @default.
- W2189597502 hasConceptScore W2189597502C71924100 @default.
- W2189597502 hasConceptScore W2189597502C78519656 @default.
- W2189597502 hasConceptScore W2189597502C97126364 @default.
- W2189597502 hasLocation W21895975021 @default.
- W2189597502 hasOpenAccess W2189597502 @default.
- W2189597502 hasPrimaryLocation W21895975021 @default.
- W2189597502 hasRelatedWork W2008386942 @default.
- W2189597502 hasRelatedWork W2055871820 @default.
- W2189597502 hasRelatedWork W2528921012 @default.
- W2189597502 hasRelatedWork W2544760729 @default.
- W2189597502 hasRelatedWork W2729347807 @default.
- W2189597502 hasRelatedWork W2969795633 @default.
- W2189597502 hasRelatedWork W2275944283 @default.
- W2189597502 hasRelatedWork W2287037464 @default.
- W2189597502 hasRelatedWork W2610660365 @default.
- W2189597502 hasRelatedWork W2732044372 @default.
- W2189597502 hasRelatedWork W2761585207 @default.
- W2189597502 hasRelatedWork W2813001705 @default.
- W2189597502 hasRelatedWork W2814776066 @default.
- W2189597502 hasRelatedWork W2830294713 @default.
- W2189597502 hasRelatedWork W2890884090 @default.
- W2189597502 hasRelatedWork W2907146273 @default.
- W2189597502 hasRelatedWork W2924741277 @default.
- W2189597502 hasRelatedWork W2959983389 @default.
- W2189597502 hasRelatedWork W2966791733 @default.
- W2189597502 hasRelatedWork W3020121752 @default.
- W2189597502 isParatext "false" @default.
- W2189597502 isRetracted "false" @default.
- W2189597502 magId "2189597502" @default.
- W2189597502 workType "article" @default.