Matches in SemOpenAlex for { <https://semopenalex.org/work/W2198102997> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2198102997 endingPage "C698" @default.
- W2198102997 startingPage "C698" @default.
- W2198102997 abstract "We have characterized thin films grown by source gas pulse introduced metallorganic chemical vapor deposition (MOCVD) technique using as a Hf precursor, and or as an oxidization gas. The Hf precursor and (or were alternately introduced with purge step, which is one growth cycle in this experiment. The residual impurity concentration in thin films can be reduced when the film is grown by pulse-MOCVD using In addition, the leakage current density has been improved for the film grown with This low leakage current density is considered to be due to the lower impurity concentration in the film grown with as an oxidization gas. © 2004 The Electrochemical Society. All rights reserved." @default.
- W2198102997 created "2016-06-24" @default.
- W2198102997 creator A5023888355 @default.
- W2198102997 creator A5027073614 @default.
- W2198102997 creator A5043820270 @default.
- W2198102997 creator A5070010707 @default.
- W2198102997 creator A5076169995 @default.
- W2198102997 date "2004-01-01" @default.
- W2198102997 modified "2023-10-17" @default.
- W2198102997 title "Source Gas Pulse-Introduced MOCVD of HfO[sub 2] Thin Films using Hf(O-t-C[sub 4]H[sub 9])[sub 4]" @default.
- W2198102997 cites W1652167103 @default.
- W2198102997 cites W1965368032 @default.
- W2198102997 cites W1970200102 @default.
- W2198102997 cites W1972526276 @default.
- W2198102997 cites W1990847672 @default.
- W2198102997 cites W2002904152 @default.
- W2198102997 cites W2003645630 @default.
- W2198102997 cites W2008449124 @default.
- W2198102997 cites W2018819617 @default.
- W2198102997 cites W2035285737 @default.
- W2198102997 cites W2036236387 @default.
- W2198102997 cites W2044492973 @default.
- W2198102997 cites W2050286473 @default.
- W2198102997 cites W2058869104 @default.
- W2198102997 cites W2091739606 @default.
- W2198102997 cites W2104245173 @default.
- W2198102997 doi "https://doi.org/10.1149/1.1802152" @default.
- W2198102997 hasPublicationYear "2004" @default.
- W2198102997 type Work @default.
- W2198102997 sameAs 2198102997 @default.
- W2198102997 citedByCount "4" @default.
- W2198102997 crossrefType "journal-article" @default.
- W2198102997 hasAuthorship W2198102997A5023888355 @default.
- W2198102997 hasAuthorship W2198102997A5027073614 @default.
- W2198102997 hasAuthorship W2198102997A5043820270 @default.
- W2198102997 hasAuthorship W2198102997A5070010707 @default.
- W2198102997 hasAuthorship W2198102997A5076169995 @default.
- W2198102997 hasConcept C110738630 @default.
- W2198102997 hasConcept C113196181 @default.
- W2198102997 hasConcept C121332964 @default.
- W2198102997 hasConcept C171250308 @default.
- W2198102997 hasConcept C175665537 @default.
- W2198102997 hasConcept C178790620 @default.
- W2198102997 hasConcept C185592680 @default.
- W2198102997 hasConcept C19067145 @default.
- W2198102997 hasConcept C192562407 @default.
- W2198102997 hasConcept C207740977 @default.
- W2198102997 hasConcept C2779227376 @default.
- W2198102997 hasConcept C49040817 @default.
- W2198102997 hasConcept C57410435 @default.
- W2198102997 hasConcept C62520636 @default.
- W2198102997 hasConcept C71987851 @default.
- W2198102997 hasConceptScore W2198102997C110738630 @default.
- W2198102997 hasConceptScore W2198102997C113196181 @default.
- W2198102997 hasConceptScore W2198102997C121332964 @default.
- W2198102997 hasConceptScore W2198102997C171250308 @default.
- W2198102997 hasConceptScore W2198102997C175665537 @default.
- W2198102997 hasConceptScore W2198102997C178790620 @default.
- W2198102997 hasConceptScore W2198102997C185592680 @default.
- W2198102997 hasConceptScore W2198102997C19067145 @default.
- W2198102997 hasConceptScore W2198102997C192562407 @default.
- W2198102997 hasConceptScore W2198102997C207740977 @default.
- W2198102997 hasConceptScore W2198102997C2779227376 @default.
- W2198102997 hasConceptScore W2198102997C49040817 @default.
- W2198102997 hasConceptScore W2198102997C57410435 @default.
- W2198102997 hasConceptScore W2198102997C62520636 @default.
- W2198102997 hasConceptScore W2198102997C71987851 @default.
- W2198102997 hasIssue "11" @default.
- W2198102997 hasLocation W21981029971 @default.
- W2198102997 hasOpenAccess W2198102997 @default.
- W2198102997 hasPrimaryLocation W21981029971 @default.
- W2198102997 hasRelatedWork W1972258301 @default.
- W2198102997 hasRelatedWork W2002397887 @default.
- W2198102997 hasRelatedWork W2007749909 @default.
- W2198102997 hasRelatedWork W2024404910 @default.
- W2198102997 hasRelatedWork W2062329057 @default.
- W2198102997 hasRelatedWork W2080259365 @default.
- W2198102997 hasRelatedWork W2093834094 @default.
- W2198102997 hasRelatedWork W2160856925 @default.
- W2198102997 hasRelatedWork W2275674231 @default.
- W2198102997 hasRelatedWork W4251512601 @default.
- W2198102997 hasVolume "151" @default.
- W2198102997 isParatext "false" @default.
- W2198102997 isRetracted "false" @default.
- W2198102997 magId "2198102997" @default.
- W2198102997 workType "article" @default.