Matches in SemOpenAlex for { <https://semopenalex.org/work/W2199338545> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2199338545 endingPage "37" @default.
- W2199338545 startingPage "32" @default.
- W2199338545 abstract "This paper describes the design and fabrication of a hermetic LTCC package for an optical MEMS chip designed for space applications. The package ensured electrical and optical connections, mechanical positioning, atmosphere control, and finally low thermally induced stress on the MEMS during the final packaging operation. The package consisted of a 10-layer LTCC case with a recessed cavity for the MEMS chip, and a glass lid (with antireflection coating and thin-film metallization for soldering) for optical I/O. The chip was mechanically attached to the bottom of the cavity with a silicone adhesive, and electrically connected through gold wire bonds. The gold wire bonding pads were routed through the LTCC module to a MegArray BGA connector. Hermetic closure of the cavity was carried out by soldering the glass lid onto the case in a controlled atmosphere. The two main difficulties involved in such a package were the high electrical connection density (400 connections) and low-temperature hermetic sealing. LTCC design rules for small-pitch lines, thick- and thin-film materials selection, screen printing, lamination techniques, and soldering methods are described in this paper." @default.
- W2199338545 created "2016-06-24" @default.
- W2199338545 creator A5000213205 @default.
- W2199338545 creator A5018217185 @default.
- W2199338545 creator A5024266682 @default.
- W2199338545 creator A5029818673 @default.
- W2199338545 creator A5090602087 @default.
- W2199338545 date "2009-01-01" @default.
- W2199338545 modified "2023-10-16" @default.
- W2199338545 title "Hermetic Package for Optical MEMS" @default.
- W2199338545 cites W1838756507 @default.
- W2199338545 cites W1840203186 @default.
- W2199338545 cites W2015220547 @default.
- W2199338545 cites W2141685565 @default.
- W2199338545 cites W2467646419 @default.
- W2199338545 doi "https://doi.org/10.4071/1551-4897-6.1.32" @default.
- W2199338545 hasPublicationYear "2009" @default.
- W2199338545 type Work @default.
- W2199338545 sameAs 2199338545 @default.
- W2199338545 citedByCount "7" @default.
- W2199338545 countsByYear W21993385452013 @default.
- W2199338545 countsByYear W21993385452019 @default.
- W2199338545 crossrefType "journal-article" @default.
- W2199338545 hasAuthorship W2199338545A5000213205 @default.
- W2199338545 hasAuthorship W2199338545A5018217185 @default.
- W2199338545 hasAuthorship W2199338545A5024266682 @default.
- W2199338545 hasAuthorship W2199338545A5029818673 @default.
- W2199338545 hasAuthorship W2199338545A5090602087 @default.
- W2199338545 hasBestOaLocation W21993385452 @default.
- W2199338545 hasConcept C111106434 @default.
- W2199338545 hasConcept C119599485 @default.
- W2199338545 hasConcept C127413603 @default.
- W2199338545 hasConcept C136525101 @default.
- W2199338545 hasConcept C142724271 @default.
- W2199338545 hasConcept C159985019 @default.
- W2199338545 hasConcept C165005293 @default.
- W2199338545 hasConcept C171250308 @default.
- W2199338545 hasConcept C192562407 @default.
- W2199338545 hasConcept C204787440 @default.
- W2199338545 hasConcept C2776584680 @default.
- W2199338545 hasConcept C2777557983 @default.
- W2199338545 hasConcept C2779227376 @default.
- W2199338545 hasConcept C37977207 @default.
- W2199338545 hasConcept C49040817 @default.
- W2199338545 hasConcept C50296614 @default.
- W2199338545 hasConcept C68928338 @default.
- W2199338545 hasConcept C69567186 @default.
- W2199338545 hasConcept C71924100 @default.
- W2199338545 hasConcept C94709252 @default.
- W2199338545 hasConceptScore W2199338545C111106434 @default.
- W2199338545 hasConceptScore W2199338545C119599485 @default.
- W2199338545 hasConceptScore W2199338545C127413603 @default.
- W2199338545 hasConceptScore W2199338545C136525101 @default.
- W2199338545 hasConceptScore W2199338545C142724271 @default.
- W2199338545 hasConceptScore W2199338545C159985019 @default.
- W2199338545 hasConceptScore W2199338545C165005293 @default.
- W2199338545 hasConceptScore W2199338545C171250308 @default.
- W2199338545 hasConceptScore W2199338545C192562407 @default.
- W2199338545 hasConceptScore W2199338545C204787440 @default.
- W2199338545 hasConceptScore W2199338545C2776584680 @default.
- W2199338545 hasConceptScore W2199338545C2777557983 @default.
- W2199338545 hasConceptScore W2199338545C2779227376 @default.
- W2199338545 hasConceptScore W2199338545C37977207 @default.
- W2199338545 hasConceptScore W2199338545C49040817 @default.
- W2199338545 hasConceptScore W2199338545C50296614 @default.
- W2199338545 hasConceptScore W2199338545C68928338 @default.
- W2199338545 hasConceptScore W2199338545C69567186 @default.
- W2199338545 hasConceptScore W2199338545C71924100 @default.
- W2199338545 hasConceptScore W2199338545C94709252 @default.
- W2199338545 hasIssue "1" @default.
- W2199338545 hasLocation W21993385451 @default.
- W2199338545 hasLocation W21993385452 @default.
- W2199338545 hasLocation W21993385453 @default.
- W2199338545 hasLocation W21993385454 @default.
- W2199338545 hasOpenAccess W2199338545 @default.
- W2199338545 hasPrimaryLocation W21993385451 @default.
- W2199338545 hasRelatedWork W1659763317 @default.
- W2199338545 hasRelatedWork W1963529503 @default.
- W2199338545 hasRelatedWork W1977597946 @default.
- W2199338545 hasRelatedWork W2125407801 @default.
- W2199338545 hasRelatedWork W2168106478 @default.
- W2199338545 hasRelatedWork W2199338545 @default.
- W2199338545 hasRelatedWork W2353322795 @default.
- W2199338545 hasRelatedWork W3175218821 @default.
- W2199338545 hasRelatedWork W90721975 @default.
- W2199338545 hasRelatedWork W2189089899 @default.
- W2199338545 hasVolume "6" @default.
- W2199338545 isParatext "false" @default.
- W2199338545 isRetracted "false" @default.
- W2199338545 magId "2199338545" @default.
- W2199338545 workType "article" @default.