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- W2200533676 abstract "It is shown that the addition of donors (D) into resists composition based on novolac resin and diazonaphthoquinone sulfonate (DQS) ensures the linear increase quantum yield of the DQS decomposition and the light-sensitivity of resist when the ionization potential of a donor decreases. These facts are explained by the exciplex D(DQS)* formation and its subsequent dissociation on unstable D+ and (DQS)- radical ions transforming into indene carboxylic acid.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2200533676 date "1998-01-01" @default.
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- W2200533676 title "<title>Photochemical processes in photoresists containing electron donor molecules</title>" @default.
- W2200533676 doi "https://doi.org/10.1117/12.301424" @default.
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