Matches in SemOpenAlex for { <https://semopenalex.org/work/W2201306209> ?p ?o ?g. }
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- W2201306209 endingPage "010701" @default.
- W2201306209 startingPage "010701" @default.
- W2201306209 abstract "The effect of a spherical shape on the measurement result of spectroscopic ellipsometry (SE) is analyzed, and a method to eliminate this effect is proposed. Based on the simulation result of the SE measurement on a silicon sphere by ray tracking, we find that the sphere makes the parallel incident beam of the SE be divergent after reflection, and the measurement error of the SE caused by this phenomenon is explained by the mixed polarization theory. By settling an aperture in front of the detector of the SE, we can almost eliminate the error. For the silicon sphere with a diameter of 94 mm used in the Avogadro project, the thickness error of the oxide layer caused by the spherical shape can be reduced from 0.73 nm to 0.04 nm by using the proposed method. The principle of the method and the results of the experimental verification are presented." @default.
- W2201306209 created "2016-06-24" @default.
- W2201306209 creator A5032075098 @default.
- W2201306209 creator A5063030133 @default.
- W2201306209 creator A5085300741 @default.
- W2201306209 date "2012-01-01" @default.
- W2201306209 modified "2023-09-28" @default.
- W2201306209 title "Mixed polarization in determining the film thickness of a silicon sphere by spectroscopic ellipsometry" @default.
- W2201306209 cites W1657388620 @default.
- W2201306209 cites W1797015614 @default.
- W2201306209 cites W2023767313 @default.
- W2201306209 cites W2028476769 @default.
- W2201306209 cites W2054092027 @default.
- W2201306209 cites W2061312562 @default.
- W2201306209 cites W2066127811 @default.
- W2201306209 cites W2083118479 @default.
- W2201306209 cites W2108602430 @default.
- W2201306209 cites W2113440600 @default.
- W2201306209 cites W2138831127 @default.
- W2201306209 cites W2167685359 @default.
- W2201306209 cites W4249556850 @default.
- W2201306209 doi "https://doi.org/10.1088/1674-1056/21/1/010701" @default.
- W2201306209 hasPublicationYear "2012" @default.
- W2201306209 type Work @default.
- W2201306209 sameAs 2201306209 @default.
- W2201306209 citedByCount "4" @default.
- W2201306209 countsByYear W22013062092013 @default.
- W2201306209 countsByYear W22013062092014 @default.
- W2201306209 countsByYear W22013062092016 @default.
- W2201306209 crossrefType "journal-article" @default.
- W2201306209 hasAuthorship W2201306209A5032075098 @default.
- W2201306209 hasAuthorship W2201306209A5063030133 @default.
- W2201306209 hasAuthorship W2201306209A5085300741 @default.
- W2201306209 hasConcept C120665830 @default.
- W2201306209 hasConcept C121332964 @default.
- W2201306209 hasConcept C140848746 @default.
- W2201306209 hasConcept C147789679 @default.
- W2201306209 hasConcept C171250308 @default.
- W2201306209 hasConcept C18293161 @default.
- W2201306209 hasConcept C185592680 @default.
- W2201306209 hasConcept C19067145 @default.
- W2201306209 hasConcept C192562407 @default.
- W2201306209 hasConcept C205049153 @default.
- W2201306209 hasConcept C24890656 @default.
- W2201306209 hasConcept C49040817 @default.
- W2201306209 hasConcept C544956773 @default.
- W2201306209 hasConcept C78336883 @default.
- W2201306209 hasConcept C94915269 @default.
- W2201306209 hasConcept C97355855 @default.
- W2201306209 hasConceptScore W2201306209C120665830 @default.
- W2201306209 hasConceptScore W2201306209C121332964 @default.
- W2201306209 hasConceptScore W2201306209C140848746 @default.
- W2201306209 hasConceptScore W2201306209C147789679 @default.
- W2201306209 hasConceptScore W2201306209C171250308 @default.
- W2201306209 hasConceptScore W2201306209C18293161 @default.
- W2201306209 hasConceptScore W2201306209C185592680 @default.
- W2201306209 hasConceptScore W2201306209C19067145 @default.
- W2201306209 hasConceptScore W2201306209C192562407 @default.
- W2201306209 hasConceptScore W2201306209C205049153 @default.
- W2201306209 hasConceptScore W2201306209C24890656 @default.
- W2201306209 hasConceptScore W2201306209C49040817 @default.
- W2201306209 hasConceptScore W2201306209C544956773 @default.
- W2201306209 hasConceptScore W2201306209C78336883 @default.
- W2201306209 hasConceptScore W2201306209C94915269 @default.
- W2201306209 hasConceptScore W2201306209C97355855 @default.
- W2201306209 hasIssue "1" @default.
- W2201306209 hasLocation W22013062091 @default.
- W2201306209 hasOpenAccess W2201306209 @default.
- W2201306209 hasPrimaryLocation W22013062091 @default.
- W2201306209 hasRelatedWork W1531000127 @default.
- W2201306209 hasRelatedWork W2000403559 @default.
- W2201306209 hasRelatedWork W2017076606 @default.
- W2201306209 hasRelatedWork W2044370385 @default.
- W2201306209 hasRelatedWork W2044585362 @default.
- W2201306209 hasRelatedWork W2045920150 @default.
- W2201306209 hasRelatedWork W2058183763 @default.
- W2201306209 hasRelatedWork W2065622029 @default.
- W2201306209 hasRelatedWork W2074926536 @default.
- W2201306209 hasRelatedWork W4362698034 @default.
- W2201306209 hasVolume "21" @default.
- W2201306209 isParatext "false" @default.
- W2201306209 isRetracted "false" @default.
- W2201306209 magId "2201306209" @default.
- W2201306209 workType "article" @default.