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- W2204530430 abstract "An automatic wafer transportation system has been developed that is suitable for LSI fabrication lines. One of the design objectives was to achieve very high cleanliness. The system consists of a computer-controlled carriage system that carries the wafer cassettes on a ceiling track, and standardised interface mechanisms installed on each LSI manufacturing machine. This paper describes an automatic LSI wafer transportation system that occupies the main section of an automated LSI production line. Automatic transfer systems have been applied to systems that move materials, parts, and documents in ordinary factories and offices. They are not designed and developed however for transfer in high cleanliness environments. They are also not suitable for such sophisticated environments as clean rooms. The transportation system described in this paper employs a ceiling-back carriage system that has a low dust count and uses minimal space. The technical and design factors responsible for achieving this LSI transfer system are based on quality engineering. Quality engineering, also called the robust design method is an engineering methodology for improving productivity during research and development." @default.
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- W2204530430 date "1993-01-01" @default.
- W2204530430 modified "2023-09-23" @default.
- W2204530430 title "Design and Evaluation LSI Wafer Transfer System Using the Quality Engineering Method" @default.
- W2204530430 hasPublicationYear "1993" @default.
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