Matches in SemOpenAlex for { <https://semopenalex.org/work/W2206797914> ?p ?o ?g. }
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- W2206797914 endingPage "075026" @default.
- W2206797914 startingPage "075026" @default.
- W2206797914 abstract "In this work, high-frequency bulk mode resonators made from low stress hydrogenated amorphous silicon (a?Si:H) thin-films are demonstrated. The microelectromechanical structures are fabricated using surface micromachining techniques at a maximum processing temperature of 175??C on glass substrates. The silicon thin-film based resonators presented here are temperature compatible with post processing on standard CMOS. The resonators are capacitively driven and sensed across 400?nm air gaps. A proof of concept design consisting of a 200??m side length square has been selectively excited in the Lam?-mode at a characteristic vibration frequency of 13.64?MHz. The quality factor of the resonators is in the 103 range and the motional resistance was measured to be approximately 21.8?M? at a DC bias voltage of 40?V." @default.
- W2206797914 created "2016-06-24" @default.
- W2206797914 creator A5067677610 @default.
- W2206797914 creator A5071900339 @default.
- W2206797914 creator A5075526589 @default.
- W2206797914 creator A5087548475 @default.
- W2206797914 date "2015-06-24" @default.
- W2206797914 modified "2023-09-27" @default.
- W2206797914 title "Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates" @default.
- W2206797914 cites W1964454488 @default.
- W2206797914 cites W1970721613 @default.
- W2206797914 cites W1972800338 @default.
- W2206797914 cites W1977501995 @default.
- W2206797914 cites W1986982460 @default.
- W2206797914 cites W1991001380 @default.
- W2206797914 cites W2004686461 @default.
- W2206797914 cites W2005638834 @default.
- W2206797914 cites W2007523394 @default.
- W2206797914 cites W2030387716 @default.
- W2206797914 cites W2030882758 @default.
- W2206797914 cites W2034874214 @default.
- W2206797914 cites W2042018655 @default.
- W2206797914 cites W2046375984 @default.
- W2206797914 cites W2055051630 @default.
- W2206797914 cites W2059507240 @default.
- W2206797914 cites W2063678280 @default.
- W2206797914 cites W2081614147 @default.
- W2206797914 cites W2085767062 @default.
- W2206797914 cites W2092011611 @default.
- W2206797914 cites W2095929384 @default.
- W2206797914 cites W2098070562 @default.
- W2206797914 cites W2108062947 @default.
- W2206797914 cites W2139334188 @default.
- W2206797914 cites W2140936624 @default.
- W2206797914 cites W2170452733 @default.
- W2206797914 cites W2545615545 @default.
- W2206797914 doi "https://doi.org/10.1088/0960-1317/25/7/075026" @default.
- W2206797914 hasPublicationYear "2015" @default.
- W2206797914 type Work @default.
- W2206797914 sameAs 2206797914 @default.
- W2206797914 citedByCount "4" @default.
- W2206797914 countsByYear W22067979142016 @default.
- W2206797914 countsByYear W22067979142017 @default.
- W2206797914 crossrefType "journal-article" @default.
- W2206797914 hasAuthorship W2206797914A5067677610 @default.
- W2206797914 hasAuthorship W2206797914A5071900339 @default.
- W2206797914 hasAuthorship W2206797914A5075526589 @default.
- W2206797914 hasAuthorship W2206797914A5087548475 @default.
- W2206797914 hasConcept C159985019 @default.
- W2206797914 hasConcept C171250308 @default.
- W2206797914 hasConcept C185592680 @default.
- W2206797914 hasConcept C19067145 @default.
- W2206797914 hasConcept C192562407 @default.
- W2206797914 hasConcept C2776390347 @default.
- W2206797914 hasConcept C2779667780 @default.
- W2206797914 hasConcept C49040817 @default.
- W2206797914 hasConcept C544956773 @default.
- W2206797914 hasConcept C56052488 @default.
- W2206797914 hasConcept C8010536 @default.
- W2206797914 hasConcept C97126364 @default.
- W2206797914 hasConceptScore W2206797914C159985019 @default.
- W2206797914 hasConceptScore W2206797914C171250308 @default.
- W2206797914 hasConceptScore W2206797914C185592680 @default.
- W2206797914 hasConceptScore W2206797914C19067145 @default.
- W2206797914 hasConceptScore W2206797914C192562407 @default.
- W2206797914 hasConceptScore W2206797914C2776390347 @default.
- W2206797914 hasConceptScore W2206797914C2779667780 @default.
- W2206797914 hasConceptScore W2206797914C49040817 @default.
- W2206797914 hasConceptScore W2206797914C544956773 @default.
- W2206797914 hasConceptScore W2206797914C56052488 @default.
- W2206797914 hasConceptScore W2206797914C8010536 @default.
- W2206797914 hasConceptScore W2206797914C97126364 @default.
- W2206797914 hasFunder F4320334779 @default.
- W2206797914 hasIssue "7" @default.
- W2206797914 hasLocation W22067979141 @default.
- W2206797914 hasOpenAccess W2206797914 @default.
- W2206797914 hasPrimaryLocation W22067979141 @default.
- W2206797914 hasRelatedWork W2009819460 @default.
- W2206797914 hasRelatedWork W2013783467 @default.
- W2206797914 hasRelatedWork W2017099024 @default.
- W2206797914 hasRelatedWork W2026948001 @default.
- W2206797914 hasRelatedWork W2061728122 @default.
- W2206797914 hasRelatedWork W2078681631 @default.
- W2206797914 hasRelatedWork W2083321254 @default.
- W2206797914 hasRelatedWork W2089633568 @default.
- W2206797914 hasRelatedWork W2095015337 @default.
- W2206797914 hasRelatedWork W2129859591 @default.
- W2206797914 hasVolume "25" @default.
- W2206797914 isParatext "false" @default.
- W2206797914 isRetracted "false" @default.
- W2206797914 magId "2206797914" @default.
- W2206797914 workType "article" @default.