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- W2207387831 abstract "Multi-period low-emissivity (low-e) filters based on [TiO₂|Ti|Ag|TiO₂] layer structure were designed and fabricated by a RF magnetron sputtering method. Optical, structural, chemical, and electrical properties were investigated with various analytical tools. Interface layers consisting of Ag, Ti, and O were observed next to Ag layers by Rutherford backscattering spectrometry (RES) analysis. The results show that Ti layers of ~1.8 ㎚ protect the Ag layers from oxidation better than those of ~1 ㎚ and the optical spectra of the filter with thicker Ti layers are in agreement with the simulated one. The average transmittance of a low-e filter with thicker Ti layers is reduced and the sheet resistance is slightly increased due to the increased Ti thickness." @default.
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- W2207387831 date "2002-06-01" @default.
- W2207387831 modified "2023-09-26" @default.
- W2207387831 title "Optical and Structural Properties of Multi - period Low - emissivity Filters by RF Magnetron Sputtering" @default.
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