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- W2213078184 abstract "In this paper microplasma generated in a flexible plasma device was investigated. Various plastic films were used as front and rear substrates to fabricate the flexible plasma device. On the rear substrate, a copper metal was patterned as sustain electrodes via the thermal evaporation and a photolithography method. Following this, a dielectric and a MgO protective layers were coated via spin coating and e-beam evaporation method, respectively. Barrier ribs were formed to make the discharge space between front and rear substrates. Finally, the two substrates were sealed. The Ne gas was used as a discharge gas. From the measurement results, microplasma showed the different electrical and optical characteristics in accordance with a variation of the thickness of the dielectric layer and a gas pressure. Additionally, the microplasma characteristics were investigated by varying the aging time of the MgO layer." @default.
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- W2213078184 date "2008-06-01" @default.
- W2213078184 modified "2023-09-27" @default.
- W2213078184 title "Characteristics of the microplasma generated in a flexible plasma device" @default.
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- W2213078184 doi "https://doi.org/10.1109/plasma.2008.4591138" @default.
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