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• W2214918312 abstract "Power scavenging is a method of extracting energy from the surrounding and converting it into electrical energy. In this paper two element array of dimensions 30×4 µm2 with IDE pattern on top is proposed. An insulation layer of SiO 2 is sandwiched in between Si and PZT layer. This layer provides the bow control of cantilever beam. Cantilever array is simulated using COMSOL multiphysics. The effect of various parameters on the performance of cantilever beam is studied. Effect of thickness of PZT layer and length of the cantilever on displacement and stress generated across the cantilever is studied." @default.
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• W2214918312 date "2015-09-01" @default.
• W2214918312 modified "2023-09-26" @default.
• W2214918312 title "Comb IDE patterned piezoelectric MEMS cantilever for sensing applications" @default.
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• W2214918312 doi "https://doi.org/10.1109/icrito.2015.7359370" @default.
• W2214918312 hasPublicationYear "2015" @default.
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