FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2220247718> ?p ?o ?g. }

• W2220247718 endingPage "053001" @default.
• W2220247718 startingPage "053001" @default.
• W2220247718 abstract "Microwave discharges (MD) are widely used as a source of non-equilibrium low pressure plasma for different applications. This paper reviews the methods of microwave plasma generation at pressures from 10−2 approximately to 30 kPa with centimeter–millimeter wavelength microwaves on the basis of scientific publications since 1950 up to the present. The review consists of 16 sections. A general look at MDs and their application is given in the introduction, together with a description of a typical block-schema of the microwave plasma generator, classification of MD, and attractive features of MD. Sections 2–12 describe the different methods of microwave plasma generators on the basis of cavity and waveguide discharges, surface and slow wave discharges, discharges with distributed energy input, initiated and surface discharges, discharges in wave beams, discharges with stochastically jumping phases of microwaves, discharges in an external magnetic field and discharges with a combination of microwave field and dc and RF fields. These methods provide the possibility of producing nonequilibriun high density plasma in small and large chambers for many applications. Plasma chemical activity of nonequilibrium microwave plasma is analyzed in section 13. A short consideration of the history and status of the problem is given. The main areas of microwave plasma application are briefly described in section 14. Non-uniformity is the inherent property of the majority of electrical discharges and MDs are no exception. Peculiarities of physical–chemical processes in strongly non-uniform MDs are demonstrated placing high emphasis on the influence of small noble gas additions to the main plasma gas (section 15). The review is illustrated by 80 figures. The list of references contains 350 scientific publications." @default.
• W2220247718 created "2016-06-24" @default.
• W2220247718 creator A5038058181 @default.
• W2220247718 date "2015-08-20" @default.
• W2220247718 modified "2023-10-13" @default.
• W2220247718 title "Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma" @default.
• W2220247718 cites W107028770 @default.
• W2220247718 cites W1634509889 @default.
• W2220247718 cites W1963535589 @default.
• W2220247718 cites W1964720226 @default.
• W2220247718 cites W1964861447 @default.
• W2220247718 cites W1965801526 @default.
• W2220247718 cites W1965863776 @default.
• W2220247718 cites W1966456288 @default.
• W2220247718 cites W1966465530 @default.
• W2220247718 cites W1967938404 @default.
• W2220247718 cites W1969222701 @default.
• W2220247718 cites W1969416479 @default.
• W2220247718 cites W1969852806 @default.
• W2220247718 cites W1970487922 @default.
• W2220247718 cites W1970829044 @default.
• W2220247718 cites W1971711390 @default.
• W2220247718 cites W1975930912 @default.
• W2220247718 cites W1976755929 @default.
• W2220247718 cites W1976940628 @default.
• W2220247718 cites W1979030903 @default.
• W2220247718 cites W1979249331 @default.
• W2220247718 cites W1979575498 @default.
• W2220247718 cites W1980038009 @default.
• W2220247718 cites W1980068242 @default.
• W2220247718 cites W1980079488 @default.
• W2220247718 cites W1980855266 @default.
• W2220247718 cites W1981987010 @default.
• W2220247718 cites W1982007858 @default.
• W2220247718 cites W1982335418 @default.
• W2220247718 cites W1982485941 @default.
• W2220247718 cites W1982491213 @default.
• W2220247718 cites W1985390334 @default.
• W2220247718 cites W1985552310 @default.
• W2220247718 cites W1985863986 @default.
• W2220247718 cites W1985956717 @default.
• W2220247718 cites W1987008843 @default.
• W2220247718 cites W1988252639 @default.
• W2220247718 cites W1988324717 @default.
• W2220247718 cites W1988492915 @default.
• W2220247718 cites W1988517682 @default.
• W2220247718 cites W1988562994 @default.
• W2220247718 cites W1989905991 @default.
• W2220247718 cites W1990109888 @default.
• W2220247718 cites W1991407380 @default.
• W2220247718 cites W1991492719 @default.
• W2220247718 cites W1992428086 @default.
• W2220247718 cites W1993006157 @default.
• W2220247718 cites W1993593326 @default.
• W2220247718 cites W1993755853 @default.
• W2220247718 cites W1994340578 @default.
• W2220247718 cites W1995034089 @default.
• W2220247718 cites W1995068543 @default.
• W2220247718 cites W1995358931 @default.
• W2220247718 cites W1996203413 @default.
• W2220247718 cites W1996495513 @default.
• W2220247718 cites W1996497293 @default.
• W2220247718 cites W1996883185 @default.
• W2220247718 cites W1997022634 @default.
• W2220247718 cites W1999060384 @default.
• W2220247718 cites W2001186375 @default.
• W2220247718 cites W2001540022 @default.
• W2220247718 cites W2001821864 @default.
• W2220247718 cites W2002411364 @default.
• W2220247718 cites W2002479977 @default.
• W2220247718 cites W2002539448 @default.
• W2220247718 cites W2003128376 @default.
• W2220247718 cites W2003786762 @default.
• W2220247718 cites W2004895599 @default.
• W2220247718 cites W2004931606 @default.
• W2220247718 cites W2005120706 @default.
• W2220247718 cites W2005339430 @default.
• W2220247718 cites W2006244862 @default.
• W2220247718 cites W2006776074 @default.
• W2220247718 cites W2008458288 @default.
• W2220247718 cites W2010754335 @default.
• W2220247718 cites W2010862884 @default.
• W2220247718 cites W2011304569 @default.
• W2220247718 cites W2013902875 @default.
• W2220247718 cites W2014840583 @default.
• W2220247718 cites W2015069042 @default.
• W2220247718 cites W2017676847 @default.
• W2220247718 cites W2018470295 @default.
• W2220247718 cites W2018922596 @default.
• W2220247718 cites W2019387693 @default.
• W2220247718 cites W2019400598 @default.
• W2220247718 cites W2020534379 @default.
• W2220247718 cites W2020534884 @default.
• W2220247718 cites W2022370809 @default.
• W2220247718 cites W2023382770 @default.
• W2220247718 cites W2023474073 @default.
• W2220247718 cites W2023685637 @default.
• W2220247718 cites W2023848833 @default.

• next