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- W2221769013 abstract "This paper outlines the present status and future prospects for micromachining silicon. Suspended microstructures can be deflected electrostatically to open and close tunnel gaps. Possible applications of micromechanical structures include resonators, accelerometers, sensors and integrated scanning probe microscopes." @default.
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- W2221769013 date "1993-12-02" @default.
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- W2221769013 title "CMOS compatible micromachined resonators" @default.
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