Matches in SemOpenAlex for { <https://semopenalex.org/work/W2222272830> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2222272830 endingPage "036002" @default.
- W2222272830 startingPage "036002" @default.
- W2222272830 abstract "The evaluation methods of planarization capability of copper slurry are investigated. Planarization capability and material removal rate are the most essential properties of slurry. The goal of chemical mechanical polishing (CMP) is to achieve a flat and smooth surface. Planarization capability is the elimination capability of the step height on the copper pattern wafer surface, and reflects the passivation capability of the slurry to a certain extent. Through analyzing the planarization mechanism of the CMP process and experimental results, the planarization capability of the slurry can be evaluated by the following five aspects: pressure sensitivity, temperature sensitivity, static etch rate, planarization efficiency and saturation properties." @default.
- W2222272830 created "2016-06-24" @default.
- W2222272830 creator A5025073719 @default.
- W2222272830 creator A5027089731 @default.
- W2222272830 creator A5035562422 @default.
- W2222272830 creator A5051053420 @default.
- W2222272830 creator A5086989815 @default.
- W2222272830 date "2013-03-01" @default.
- W2222272830 modified "2023-10-18" @default.
- W2222272830 title "Evaluation of planarization capability of copper slurry in the CMP process" @default.
- W2222272830 cites W1565497083 @default.
- W2222272830 cites W1656443306 @default.
- W2222272830 cites W1984983615 @default.
- W2222272830 cites W1987577362 @default.
- W2222272830 cites W1997738448 @default.
- W2222272830 cites W2020770344 @default.
- W2222272830 cites W2030652526 @default.
- W2222272830 cites W2047278920 @default.
- W2222272830 cites W2053139551 @default.
- W2222272830 cites W2054002872 @default.
- W2222272830 cites W2080006944 @default.
- W2222272830 cites W2094255929 @default.
- W2222272830 cites W2163090989 @default.
- W2222272830 doi "https://doi.org/10.1088/1674-4926/34/3/036002" @default.
- W2222272830 hasPublicationYear "2013" @default.
- W2222272830 type Work @default.
- W2222272830 sameAs 2222272830 @default.
- W2222272830 citedByCount "13" @default.
- W2222272830 countsByYear W22222728302013 @default.
- W2222272830 countsByYear W22222728302014 @default.
- W2222272830 countsByYear W22222728302015 @default.
- W2222272830 countsByYear W22222728302017 @default.
- W2222272830 countsByYear W22222728302019 @default.
- W2222272830 countsByYear W22222728302023 @default.
- W2222272830 crossrefType "journal-article" @default.
- W2222272830 hasAuthorship W2222272830A5025073719 @default.
- W2222272830 hasAuthorship W2222272830A5027089731 @default.
- W2222272830 hasAuthorship W2222272830A5035562422 @default.
- W2222272830 hasAuthorship W2222272830A5051053420 @default.
- W2222272830 hasAuthorship W2222272830A5086989815 @default.
- W2222272830 hasConcept C138113353 @default.
- W2222272830 hasConcept C159985019 @default.
- W2222272830 hasConcept C160671074 @default.
- W2222272830 hasConcept C171250308 @default.
- W2222272830 hasConcept C180088628 @default.
- W2222272830 hasConcept C191897082 @default.
- W2222272830 hasConcept C192562407 @default.
- W2222272830 hasConcept C2779227376 @default.
- W2222272830 hasConcept C33574316 @default.
- W2222272830 hasConcept C544778455 @default.
- W2222272830 hasConcept C94293008 @default.
- W2222272830 hasConceptScore W2222272830C138113353 @default.
- W2222272830 hasConceptScore W2222272830C159985019 @default.
- W2222272830 hasConceptScore W2222272830C160671074 @default.
- W2222272830 hasConceptScore W2222272830C171250308 @default.
- W2222272830 hasConceptScore W2222272830C180088628 @default.
- W2222272830 hasConceptScore W2222272830C191897082 @default.
- W2222272830 hasConceptScore W2222272830C192562407 @default.
- W2222272830 hasConceptScore W2222272830C2779227376 @default.
- W2222272830 hasConceptScore W2222272830C33574316 @default.
- W2222272830 hasConceptScore W2222272830C544778455 @default.
- W2222272830 hasConceptScore W2222272830C94293008 @default.
- W2222272830 hasIssue "3" @default.
- W2222272830 hasLocation W22222728301 @default.
- W2222272830 hasOpenAccess W2222272830 @default.
- W2222272830 hasPrimaryLocation W22222728301 @default.
- W2222272830 hasRelatedWork W1966830599 @default.
- W2222272830 hasRelatedWork W1995265102 @default.
- W2222272830 hasRelatedWork W2034054684 @default.
- W2222272830 hasRelatedWork W2072988759 @default.
- W2222272830 hasRelatedWork W2106409363 @default.
- W2222272830 hasRelatedWork W2358991049 @default.
- W2222272830 hasRelatedWork W2361080674 @default.
- W2222272830 hasRelatedWork W2380871068 @default.
- W2222272830 hasRelatedWork W2657382776 @default.
- W2222272830 hasRelatedWork W3117742313 @default.
- W2222272830 hasVolume "34" @default.
- W2222272830 isParatext "false" @default.
- W2222272830 isRetracted "false" @default.
- W2222272830 magId "2222272830" @default.
- W2222272830 workType "article" @default.