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• W2225654054 abstract "A new method on examining the micro cracks of monocrystalline silicon during nano indentation is proposed. It is established based on a study of the increasing rate of absorbed energy in nano indentation. This method provides a simple approach in understanding whether cracks on the silicon surfaces occur, while it is tedious in conventional method." @default.
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• W2225654054 date "2007-12-01" @default.
• W2225654054 modified "2023-10-14" @default.
• W2225654054 title "Method of Examining Surface Cracks on Monocrystalline Silicon" @default.
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• W2225654054 doi "https://doi.org/10.4028/www.scientific.net/kem.364-366.920" @default.
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