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- W2225698523 abstract "Anodic bonding,with metal or alloy thin films as an intermediate layer,findsincreasing applications in micro/nano electromechanical systems(MEMS/NEMS).Atthe bonding temperature of 350℃,voltage of 400 V and duration of 30 minutes,theanodic bonding is completed between Pyrex glass and crystalline ..." @default.
- W2225698523 created "2016-06-24" @default.
- W2225698523 creator A5045037141 @default.
- W2225698523 creator A5062030815 @default.
- W2225698523 creator A5070579533 @default.
- W2225698523 date "2005-01-01" @default.
- W2225698523 modified "2023-09-23" @default.
- W2225698523 title "Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film" @default.
- W2225698523 hasPublicationYear "2005" @default.
- W2225698523 type Work @default.
- W2225698523 sameAs 2225698523 @default.
- W2225698523 citedByCount "0" @default.
- W2225698523 crossrefType "journal-article" @default.
- W2225698523 hasAuthorship W2225698523A5045037141 @default.
- W2225698523 hasAuthorship W2225698523A5062030815 @default.
- W2225698523 hasAuthorship W2225698523A5070579533 @default.
- W2225698523 hasConcept C127413603 @default.
- W2225698523 hasConcept C136525101 @default.
- W2225698523 hasConcept C142724271 @default.
- W2225698523 hasConcept C147789679 @default.
- W2225698523 hasConcept C159985019 @default.
- W2225698523 hasConcept C171250308 @default.
- W2225698523 hasConcept C17525397 @default.
- W2225698523 hasConcept C185592680 @default.
- W2225698523 hasConcept C186187911 @default.
- W2225698523 hasConcept C19067145 @default.
- W2225698523 hasConcept C191897082 @default.
- W2225698523 hasConcept C192562407 @default.
- W2225698523 hasConcept C201414436 @default.
- W2225698523 hasConcept C204787440 @default.
- W2225698523 hasConcept C2779227376 @default.
- W2225698523 hasConcept C2779445004 @default.
- W2225698523 hasConcept C2780026712 @default.
- W2225698523 hasConcept C37977207 @default.
- W2225698523 hasConcept C42360764 @default.
- W2225698523 hasConcept C513153333 @default.
- W2225698523 hasConcept C544956773 @default.
- W2225698523 hasConcept C71924100 @default.
- W2225698523 hasConcept C89395315 @default.
- W2225698523 hasConceptScore W2225698523C127413603 @default.
- W2225698523 hasConceptScore W2225698523C136525101 @default.
- W2225698523 hasConceptScore W2225698523C142724271 @default.
- W2225698523 hasConceptScore W2225698523C147789679 @default.
- W2225698523 hasConceptScore W2225698523C159985019 @default.
- W2225698523 hasConceptScore W2225698523C171250308 @default.
- W2225698523 hasConceptScore W2225698523C17525397 @default.
- W2225698523 hasConceptScore W2225698523C185592680 @default.
- W2225698523 hasConceptScore W2225698523C186187911 @default.
- W2225698523 hasConceptScore W2225698523C19067145 @default.
- W2225698523 hasConceptScore W2225698523C191897082 @default.
- W2225698523 hasConceptScore W2225698523C192562407 @default.
- W2225698523 hasConceptScore W2225698523C201414436 @default.
- W2225698523 hasConceptScore W2225698523C204787440 @default.
- W2225698523 hasConceptScore W2225698523C2779227376 @default.
- W2225698523 hasConceptScore W2225698523C2779445004 @default.
- W2225698523 hasConceptScore W2225698523C2780026712 @default.
- W2225698523 hasConceptScore W2225698523C37977207 @default.
- W2225698523 hasConceptScore W2225698523C42360764 @default.
- W2225698523 hasConceptScore W2225698523C513153333 @default.
- W2225698523 hasConceptScore W2225698523C544956773 @default.
- W2225698523 hasConceptScore W2225698523C71924100 @default.
- W2225698523 hasConceptScore W2225698523C89395315 @default.
- W2225698523 hasLocation W22256985231 @default.
- W2225698523 hasOpenAccess W2225698523 @default.
- W2225698523 hasPrimaryLocation W22256985231 @default.
- W2225698523 hasRelatedWork W1578025657 @default.
- W2225698523 hasRelatedWork W1968857492 @default.
- W2225698523 hasRelatedWork W1971915106 @default.
- W2225698523 hasRelatedWork W1972112128 @default.
- W2225698523 hasRelatedWork W2002365415 @default.
- W2225698523 hasRelatedWork W2027918929 @default.
- W2225698523 hasRelatedWork W2036016985 @default.
- W2225698523 hasRelatedWork W2041281868 @default.
- W2225698523 hasRelatedWork W2062633259 @default.
- W2225698523 hasRelatedWork W2069274715 @default.
- W2225698523 hasRelatedWork W2090308639 @default.
- W2225698523 hasRelatedWork W2090466102 @default.
- W2225698523 hasRelatedWork W2109012526 @default.
- W2225698523 hasRelatedWork W2158475631 @default.
- W2225698523 hasRelatedWork W2216191934 @default.
- W2225698523 hasRelatedWork W2227475235 @default.
- W2225698523 hasRelatedWork W2347713446 @default.
- W2225698523 hasRelatedWork W2472634467 @default.
- W2225698523 hasRelatedWork W2906270067 @default.
- W2225698523 hasRelatedWork W854352006 @default.
- W2225698523 isParatext "false" @default.
- W2225698523 isRetracted "false" @default.
- W2225698523 magId "2225698523" @default.
- W2225698523 workType "article" @default.