FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2226931680> ?p ?o ?g. }

• W2226931680 endingPage "156" @default.
• W2226931680 startingPage "154" @default.
• W2226931680 abstract "Carbon nitride thin films were deposited on Si(001) using unbalanced magnetron sputtering at different experimental parameters. The effects of nitrogen partial pressure, substrate temperature and substrate bias on the deposition rate and nitrogen content are discussed." @default.
• W2226931680 created "2016-06-24" @default.
• W2226931680 creator A5016924078 @default.
• W2226931680 creator A5054484921 @default.
• W2226931680 creator A5091351871 @default.
• W2226931680 date "2009-10-10" @default.
• W2226931680 modified "2023-09-24" @default.
• W2226931680 title "Influence of Experimental Parameters on Reactive Magnetron Sputtering CN_x Thin Films" @default.
• W2226931680 hasPublicationYear "2009" @default.
• W2226931680 type Work @default.
• W2226931680 sameAs 2226931680 @default.
• W2226931680 citedByCount "1" @default.
• W2226931680 crossrefType "journal-article" @default.
• W2226931680 hasAuthorship W2226931680A5016924078 @default.
• W2226931680 hasAuthorship W2226931680A5054484921 @default.
• W2226931680 hasAuthorship W2226931680A5091351871 @default.
• W2226931680 hasConcept C107872376 @default.
• W2226931680 hasConcept C111368507 @default.
• W2226931680 hasConcept C113196181 @default.
• W2226931680 hasConcept C123408415 @default.
• W2226931680 hasConcept C127313418 @default.
• W2226931680 hasConcept C127413603 @default.
• W2226931680 hasConcept C151730666 @default.
• W2226931680 hasConcept C159985019 @default.
• W2226931680 hasConcept C161790260 @default.
• W2226931680 hasConcept C171250308 @default.
• W2226931680 hasConcept C178790620 @default.
• W2226931680 hasConcept C185592680 @default.
• W2226931680 hasConcept C19067145 @default.
• W2226931680 hasConcept C192562407 @default.
• W2226931680 hasConcept C194760766 @default.
• W2226931680 hasConcept C22423302 @default.
• W2226931680 hasConcept C2777289219 @default.
• W2226931680 hasConcept C2777492770 @default.
• W2226931680 hasConcept C2779227376 @default.
• W2226931680 hasConcept C2816523 @default.
• W2226931680 hasConcept C42360764 @default.
• W2226931680 hasConcept C537208039 @default.
• W2226931680 hasConcept C540031477 @default.
• W2226931680 hasConcept C55493867 @default.
• W2226931680 hasConcept C61427134 @default.
• W2226931680 hasConcept C64297162 @default.
• W2226931680 hasConcept C65165184 @default.
• W2226931680 hasConcept C68463220 @default.
• W2226931680 hasConcept C86803240 @default.
• W2226931680 hasConcept C97892325 @default.
• W2226931680 hasConceptScore W2226931680C107872376 @default.
• W2226931680 hasConceptScore W2226931680C111368507 @default.
• W2226931680 hasConceptScore W2226931680C113196181 @default.
• W2226931680 hasConceptScore W2226931680C123408415 @default.
• W2226931680 hasConceptScore W2226931680C127313418 @default.
• W2226931680 hasConceptScore W2226931680C127413603 @default.
• W2226931680 hasConceptScore W2226931680C151730666 @default.
• W2226931680 hasConceptScore W2226931680C159985019 @default.
• W2226931680 hasConceptScore W2226931680C161790260 @default.
• W2226931680 hasConceptScore W2226931680C171250308 @default.
• W2226931680 hasConceptScore W2226931680C178790620 @default.
• W2226931680 hasConceptScore W2226931680C185592680 @default.
• W2226931680 hasConceptScore W2226931680C19067145 @default.
• W2226931680 hasConceptScore W2226931680C192562407 @default.
• W2226931680 hasConceptScore W2226931680C194760766 @default.
• W2226931680 hasConceptScore W2226931680C22423302 @default.
• W2226931680 hasConceptScore W2226931680C2777289219 @default.
• W2226931680 hasConceptScore W2226931680C2777492770 @default.
• W2226931680 hasConceptScore W2226931680C2779227376 @default.
• W2226931680 hasConceptScore W2226931680C2816523 @default.
• W2226931680 hasConceptScore W2226931680C42360764 @default.
• W2226931680 hasConceptScore W2226931680C537208039 @default.
• W2226931680 hasConceptScore W2226931680C540031477 @default.
• W2226931680 hasConceptScore W2226931680C55493867 @default.
• W2226931680 hasConceptScore W2226931680C61427134 @default.
• W2226931680 hasConceptScore W2226931680C64297162 @default.
• W2226931680 hasConceptScore W2226931680C65165184 @default.
• W2226931680 hasConceptScore W2226931680C68463220 @default.
• W2226931680 hasConceptScore W2226931680C86803240 @default.
• W2226931680 hasConceptScore W2226931680C97892325 @default.
• W2226931680 hasIssue "2" @default.
• W2226931680 hasLocation W22269316801 @default.
• W2226931680 hasOpenAccess W2226931680 @default.
• W2226931680 hasPrimaryLocation W22269316801 @default.
• W2226931680 hasRelatedWork W1517753199 @default.
• W2226931680 hasRelatedWork W1522636725 @default.
• W2226931680 hasRelatedWork W2015637928 @default.
• W2226931680 hasRelatedWork W2026690394 @default.
• W2226931680 hasRelatedWork W2067867567 @default.
• W2226931680 hasRelatedWork W2085733290 @default.
• W2226931680 hasRelatedWork W2138802969 @default.
• W2226931680 hasRelatedWork W2140947812 @default.
• W2226931680 hasRelatedWork W2363056513 @default.
• W2226931680 hasRelatedWork W2371288846 @default.
• W2226931680 hasRelatedWork W2754709097 @default.
• W2226931680 hasRelatedWork W2764610393 @default.
• W2226931680 hasRelatedWork W2951070226 @default.
• W2226931680 hasRelatedWork W3005101367 @default.
• W2226931680 hasRelatedWork W302632079 @default.
• W2226931680 hasRelatedWork W3108451283 @default.
• W2226931680 hasRelatedWork W3117810377 @default.
• W2226931680 hasRelatedWork W3133885397 @default.

• next