Matches in SemOpenAlex for { <https://semopenalex.org/work/W2227107447> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2227107447 endingPage "497" @default.
- W2227107447 startingPage "493" @default.
- W2227107447 abstract "As the level of Si-wafer surface directly affects device line-width capability, process latitude, yield, and throughput in fabrication of microchips, it needs to have ultra precision surface and flatness. Polishing is one of the important processing having influence on the surface roughness in manufacturing of Si-wafers. The surface roughness in wafer polishing is mainly affected by the many process parameters. For decreasing the surface roughness, the control of polishing parameters is very important. In this paper, the optimum condition selection of ultra precision wafer polishing and the effect of polishing parameters on the surface roughness were evaluated by the statistical analysis of the process parameters." @default.
- W2227107447 created "2016-06-24" @default.
- W2227107447 creator A5015821441 @default.
- W2227107447 creator A5019669717 @default.
- W2227107447 creator A5022048183 @default.
- W2227107447 creator A5052371988 @default.
- W2227107447 date "2008-09-01" @default.
- W2227107447 modified "2023-09-23" @default.
- W2227107447 title "A Study on Statistical Analysis of Si-Wafer Polishing Process for the Optimum Polishing Condition" @default.
- W2227107447 cites W1966228423 @default.
- W2227107447 cites W2002676331 @default.
- W2227107447 cites W2031939792 @default.
- W2227107447 cites W2153413238 @default.
- W2227107447 cites W2227107447 @default.
- W2227107447 doi "https://doi.org/10.4028/www.scientific.net/kem.389-390.493" @default.
- W2227107447 hasPublicationYear "2008" @default.
- W2227107447 type Work @default.
- W2227107447 sameAs 2227107447 @default.
- W2227107447 citedByCount "1" @default.
- W2227107447 crossrefType "journal-article" @default.
- W2227107447 hasAuthorship W2227107447A5015821441 @default.
- W2227107447 hasAuthorship W2227107447A5019669717 @default.
- W2227107447 hasAuthorship W2227107447A5022048183 @default.
- W2227107447 hasAuthorship W2227107447A5052371988 @default.
- W2227107447 hasConcept C107365816 @default.
- W2227107447 hasConcept C121332964 @default.
- W2227107447 hasConcept C127413603 @default.
- W2227107447 hasConcept C136525101 @default.
- W2227107447 hasConcept C138113353 @default.
- W2227107447 hasConcept C142724271 @default.
- W2227107447 hasConcept C159985019 @default.
- W2227107447 hasConcept C160671074 @default.
- W2227107447 hasConcept C180088628 @default.
- W2227107447 hasConcept C192562407 @default.
- W2227107447 hasConcept C199639397 @default.
- W2227107447 hasConcept C204787440 @default.
- W2227107447 hasConcept C26405456 @default.
- W2227107447 hasConcept C2778530986 @default.
- W2227107447 hasConcept C49040817 @default.
- W2227107447 hasConcept C62520636 @default.
- W2227107447 hasConcept C71039073 @default.
- W2227107447 hasConcept C71924100 @default.
- W2227107447 hasConcept C78519656 @default.
- W2227107447 hasConceptScore W2227107447C107365816 @default.
- W2227107447 hasConceptScore W2227107447C121332964 @default.
- W2227107447 hasConceptScore W2227107447C127413603 @default.
- W2227107447 hasConceptScore W2227107447C136525101 @default.
- W2227107447 hasConceptScore W2227107447C138113353 @default.
- W2227107447 hasConceptScore W2227107447C142724271 @default.
- W2227107447 hasConceptScore W2227107447C159985019 @default.
- W2227107447 hasConceptScore W2227107447C160671074 @default.
- W2227107447 hasConceptScore W2227107447C180088628 @default.
- W2227107447 hasConceptScore W2227107447C192562407 @default.
- W2227107447 hasConceptScore W2227107447C199639397 @default.
- W2227107447 hasConceptScore W2227107447C204787440 @default.
- W2227107447 hasConceptScore W2227107447C26405456 @default.
- W2227107447 hasConceptScore W2227107447C2778530986 @default.
- W2227107447 hasConceptScore W2227107447C49040817 @default.
- W2227107447 hasConceptScore W2227107447C62520636 @default.
- W2227107447 hasConceptScore W2227107447C71039073 @default.
- W2227107447 hasConceptScore W2227107447C71924100 @default.
- W2227107447 hasConceptScore W2227107447C78519656 @default.
- W2227107447 hasLocation W22271074471 @default.
- W2227107447 hasOpenAccess W2227107447 @default.
- W2227107447 hasPrimaryLocation W22271074471 @default.
- W2227107447 hasRelatedWork W2002187222 @default.
- W2227107447 hasRelatedWork W2026801433 @default.
- W2227107447 hasRelatedWork W2035575938 @default.
- W2227107447 hasRelatedWork W2051445071 @default.
- W2227107447 hasRelatedWork W2227107447 @default.
- W2227107447 hasRelatedWork W2231967981 @default.
- W2227107447 hasRelatedWork W2330622973 @default.
- W2227107447 hasRelatedWork W2356978086 @default.
- W2227107447 hasRelatedWork W2386265898 @default.
- W2227107447 hasRelatedWork W586105622 @default.
- W2227107447 hasVolume "389-390" @default.
- W2227107447 isParatext "false" @default.
- W2227107447 isRetracted "false" @default.
- W2227107447 magId "2227107447" @default.
- W2227107447 workType "article" @default.