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- W2227679 abstract "This paper examines the effect of hydrogen in the plasma deposition of amorphous and crystalline silicon and silicon carbides by deliberately adding hydrogen to the plasma. Particular emphasis has been placed on the transition from amorphous to microcrystalline and polycrystalline structures in the PECVD process. Hydrogen is found to govern the film formation process by promoting the reverse process, ‘etching’, which includes all reactions that do not lead to network propagation. By preferentially eliminating energetically unfavorable configurations during the growth, hydrogen controls the structure, growth mechanism, hydrogen and dopant incorporation, transport, and grain growth of the film. Excessive hydrogen dilution, however, reduces the grain size by changing the columnar grain growth to a more spherical-like grain growth, and eventually eliminates film growth. By promoting ‘etching’,hydrogen plays an important role in producing low-temperature crystalline silicon and alloys. We found that polycrystalline silicon with grains as large as 200nm can be obtained at a temperature as low as 200°C." @default.
- W2227679 created "2016-06-24" @default.
- W2227679 creator A5070588506 @default.
- W2227679 date "1989-01-01" @default.
- W2227679 modified "2023-09-24" @default.
- W2227679 title "The Influence of Hydrogen on the Transition from Amorphous to Crystalline Structure in Plasma Deposition of Silicon and Alloys" @default.
- W2227679 doi "https://doi.org/10.1007/978-3-642-75048-9_31" @default.
- W2227679 hasPublicationYear "1989" @default.
- W2227679 type Work @default.
- W2227679 sameAs 2227679 @default.
- W2227679 citedByCount "0" @default.
- W2227679 crossrefType "book-chapter" @default.
- W2227679 hasAuthorship W2227679A5070588506 @default.
- W2227679 hasConcept C100460472 @default.
- W2227679 hasConcept C127413603 @default.
- W2227679 hasConcept C137637335 @default.
- W2227679 hasConcept C171250308 @default.
- W2227679 hasConcept C178790620 @default.
- W2227679 hasConcept C185592680 @default.
- W2227679 hasConcept C191897082 @default.
- W2227679 hasConcept C191952053 @default.
- W2227679 hasConcept C192191005 @default.
- W2227679 hasConcept C192562407 @default.
- W2227679 hasConcept C2776390347 @default.
- W2227679 hasConcept C2779227376 @default.
- W2227679 hasConcept C2779667780 @default.
- W2227679 hasConcept C2780565262 @default.
- W2227679 hasConcept C38347018 @default.
- W2227679 hasConcept C42360764 @default.
- W2227679 hasConcept C49040817 @default.
- W2227679 hasConcept C512968161 @default.
- W2227679 hasConcept C544956773 @default.
- W2227679 hasConcept C56052488 @default.
- W2227679 hasConcept C57863236 @default.
- W2227679 hasConcept C80086925 @default.
- W2227679 hasConcept C8010536 @default.
- W2227679 hasConcept C87359718 @default.
- W2227679 hasConcept C98390173 @default.
- W2227679 hasConceptScore W2227679C100460472 @default.
- W2227679 hasConceptScore W2227679C127413603 @default.
- W2227679 hasConceptScore W2227679C137637335 @default.
- W2227679 hasConceptScore W2227679C171250308 @default.
- W2227679 hasConceptScore W2227679C178790620 @default.
- W2227679 hasConceptScore W2227679C185592680 @default.
- W2227679 hasConceptScore W2227679C191897082 @default.
- W2227679 hasConceptScore W2227679C191952053 @default.
- W2227679 hasConceptScore W2227679C192191005 @default.
- W2227679 hasConceptScore W2227679C192562407 @default.
- W2227679 hasConceptScore W2227679C2776390347 @default.
- W2227679 hasConceptScore W2227679C2779227376 @default.
- W2227679 hasConceptScore W2227679C2779667780 @default.
- W2227679 hasConceptScore W2227679C2780565262 @default.
- W2227679 hasConceptScore W2227679C38347018 @default.
- W2227679 hasConceptScore W2227679C42360764 @default.
- W2227679 hasConceptScore W2227679C49040817 @default.
- W2227679 hasConceptScore W2227679C512968161 @default.
- W2227679 hasConceptScore W2227679C544956773 @default.
- W2227679 hasConceptScore W2227679C56052488 @default.
- W2227679 hasConceptScore W2227679C57863236 @default.
- W2227679 hasConceptScore W2227679C80086925 @default.
- W2227679 hasConceptScore W2227679C8010536 @default.
- W2227679 hasConceptScore W2227679C87359718 @default.
- W2227679 hasConceptScore W2227679C98390173 @default.
- W2227679 hasLocation W22276791 @default.
- W2227679 hasOpenAccess W2227679 @default.
- W2227679 hasPrimaryLocation W22276791 @default.
- W2227679 hasRelatedWork W1967740171 @default.
- W2227679 hasRelatedWork W1969242988 @default.
- W2227679 hasRelatedWork W1970819373 @default.
- W2227679 hasRelatedWork W1980089199 @default.
- W2227679 hasRelatedWork W1985395891 @default.
- W2227679 hasRelatedWork W1985594181 @default.
- W2227679 hasRelatedWork W2007144606 @default.
- W2227679 hasRelatedWork W2015166972 @default.
- W2227679 hasRelatedWork W2015539668 @default.
- W2227679 hasRelatedWork W2040460611 @default.
- W2227679 hasRelatedWork W2045248148 @default.
- W2227679 hasRelatedWork W2048280493 @default.
- W2227679 hasRelatedWork W2064718222 @default.
- W2227679 hasRelatedWork W2073831885 @default.
- W2227679 hasRelatedWork W2077631233 @default.
- W2227679 hasRelatedWork W2112055904 @default.
- W2227679 hasRelatedWork W2312806484 @default.
- W2227679 hasRelatedWork W2317094292 @default.
- W2227679 hasRelatedWork W2757627067 @default.
- W2227679 hasRelatedWork W2763576026 @default.
- W2227679 isParatext "false" @default.
- W2227679 isRetracted "false" @default.
- W2227679 magId "2227679" @default.
- W2227679 workType "book-chapter" @default.