Matches in SemOpenAlex for { <https://semopenalex.org/work/W2234223721> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2234223721 abstract "This chapter is designed to discuss the activities of the AIXTRON group of companies in the metal organic vapor phase epitaxy (MOVPE) of III-nitrides. AIXTRON is a pure supplier of equipment for the semiconductor market. The MOVPE of III-nitrides became important in the early 1990s when nitride-based light-emitting diodes (LEDs) were demonstrated. In the mid-1990s, a few groups were able to grow LED structures on these small systems and the first interest in larger scale reactors for the production of blue LEDs developed. At that time, production processes for growing the GaAlInP-based epilayers used for LEDs operating in the yellow to red spectral region were established on multi-wafer systems. These systems were not able to grow gallium nitride (GaN)-based material because the maximum operation temperature was limited to 900°C. The current market requirements for production MOVPE machines are changed from those of the late 1990s. Today, the market expects a system with high throughput and low cost of ownership (COO) combined with high performance regarding the uniformity of layer properties such as thickness, wavelength, electro-luminescence intensity, and doping level. Computational modeling of nitride MOVPE processes and reactors is essential in the development of metal organic chemical vapor deposition (MOCVD) equipment." @default.
- W2234223721 created "2016-06-24" @default.
- W2234223721 creator A5000288516 @default.
- W2234223721 creator A5019137293 @default.
- W2234223721 creator A5033234039 @default.
- W2234223721 creator A5088166838 @default.
- W2234223721 date "2005-01-01" @default.
- W2234223721 modified "2023-10-17" @default.
- W2234223721 title "Technology of MOVPE Production Tools" @default.
- W2234223721 cites W1965482967 @default.
- W2234223721 cites W1985728152 @default.
- W2234223721 cites W1992197694 @default.
- W2234223721 cites W1995775832 @default.
- W2234223721 cites W2002447947 @default.
- W2234223721 cites W2002994847 @default.
- W2234223721 cites W2003701273 @default.
- W2234223721 cites W2005348153 @default.
- W2234223721 cites W2007930532 @default.
- W2234223721 cites W2011554022 @default.
- W2234223721 cites W2012068897 @default.
- W2234223721 cites W2012494369 @default.
- W2234223721 cites W2025134782 @default.
- W2234223721 cites W2030143785 @default.
- W2234223721 cites W2035241628 @default.
- W2234223721 cites W2054227182 @default.
- W2234223721 cites W2059157055 @default.
- W2234223721 cites W2071960135 @default.
- W2234223721 cites W2080263419 @default.
- W2234223721 cites W2145070066 @default.
- W2234223721 cites W91857624 @default.
- W2234223721 doi "https://doi.org/10.1016/b978-008044426-0/50004-3" @default.
- W2234223721 hasPublicationYear "2005" @default.
- W2234223721 type Work @default.
- W2234223721 sameAs 2234223721 @default.
- W2234223721 citedByCount "0" @default.
- W2234223721 crossrefType "book-chapter" @default.
- W2234223721 hasAuthorship W2234223721A5000288516 @default.
- W2234223721 hasAuthorship W2234223721A5019137293 @default.
- W2234223721 hasAuthorship W2234223721A5033234039 @default.
- W2234223721 hasAuthorship W2234223721A5088166838 @default.
- W2234223721 hasConcept C110738630 @default.
- W2234223721 hasConcept C148869448 @default.
- W2234223721 hasConcept C160671074 @default.
- W2234223721 hasConcept C171250308 @default.
- W2234223721 hasConcept C175665537 @default.
- W2234223721 hasConcept C176666156 @default.
- W2234223721 hasConcept C192562407 @default.
- W2234223721 hasConcept C194760766 @default.
- W2234223721 hasConcept C2778871202 @default.
- W2234223721 hasConcept C2779227376 @default.
- W2234223721 hasConcept C49040817 @default.
- W2234223721 hasConcept C57410435 @default.
- W2234223721 hasConcept C78434282 @default.
- W2234223721 hasConceptScore W2234223721C110738630 @default.
- W2234223721 hasConceptScore W2234223721C148869448 @default.
- W2234223721 hasConceptScore W2234223721C160671074 @default.
- W2234223721 hasConceptScore W2234223721C171250308 @default.
- W2234223721 hasConceptScore W2234223721C175665537 @default.
- W2234223721 hasConceptScore W2234223721C176666156 @default.
- W2234223721 hasConceptScore W2234223721C192562407 @default.
- W2234223721 hasConceptScore W2234223721C194760766 @default.
- W2234223721 hasConceptScore W2234223721C2778871202 @default.
- W2234223721 hasConceptScore W2234223721C2779227376 @default.
- W2234223721 hasConceptScore W2234223721C49040817 @default.
- W2234223721 hasConceptScore W2234223721C57410435 @default.
- W2234223721 hasConceptScore W2234223721C78434282 @default.
- W2234223721 hasLocation W22342237211 @default.
- W2234223721 hasOpenAccess W2234223721 @default.
- W2234223721 hasPrimaryLocation W22342237211 @default.
- W2234223721 hasRelatedWork W2020306102 @default.
- W2234223721 hasRelatedWork W2047606294 @default.
- W2234223721 hasRelatedWork W2083708669 @default.
- W2234223721 hasRelatedWork W2308065208 @default.
- W2234223721 hasRelatedWork W2358461634 @default.
- W2234223721 hasRelatedWork W2738974167 @default.
- W2234223721 hasRelatedWork W3128440725 @default.
- W2234223721 hasRelatedWork W4229455763 @default.
- W2234223721 hasRelatedWork W8191155 @default.
- W2234223721 hasRelatedWork W2184704261 @default.
- W2234223721 isParatext "false" @default.
- W2234223721 isRetracted "false" @default.
- W2234223721 magId "2234223721" @default.
- W2234223721 workType "book-chapter" @default.