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- W2234436574 abstract "AbstractThis work reports on the effect of a quasi-periodic (QP) voltage on the dynamics of a resonant capacitive micro-electro-mechanical system (MEMS) under DC and AC actuations. We consider that the AC actuation is composed of resonant AC and non resonant AC voltages. The microstructure device is modelled as a lumped mass-spring-damper system. Averaging technique and the method of multiple scales are performed to obtain the modulation equations of the slow dynamic near the primary resonance. The influence of the amplitude and the frequency of a high frequency voltage (HFV) on the occurrence of bistability and jumps in the frequency response is examined and the safe basin of attraction is explored. The results of this work indicate that when the mechanical parameters of the MEMS device are fixed and cannot be tuned, a HFV can be used for controlling the dynamic of the resonant capacitive MEMS.KeywordsCapacitive MEMSMicro-electro-mechanical Systems (MEMS)Safe BasinMEMS DevicePrimary ResonanceThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves." @default.
- W2234436574 created "2016-06-24" @default.
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- W2234436574 date "2015-01-01" @default.
- W2234436574 modified "2023-09-24" @default.
- W2234436574 title "Quasi-periodically Actuated Capacitive MEMS" @default.
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- W2234436574 doi "https://doi.org/10.1007/978-3-319-19851-4_10" @default.
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