FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2234632356> ?p ?o ?g. }

• W2234632356 endingPage "065202" @default.
• W2234632356 startingPage "065202" @default.
• W2234632356 abstract "A simple and cost effective approach to stabilize the sputtering process in the transition zone during reactive high-power impulse magnetron sputtering (HiPIMS) is proposed. The method is based on real-time monitoring and control of the discharge current waveforms. To stabilize the process conditions at a given set point, a feedback control system was implemented that automatically regulates the pulse frequency, and thereby the average sputtering power, to maintain a constant maximum discharge current. In the present study, the variation of the pulse current waveforms over a wide range of reactive gas flows and pulse frequencies during a reactive HiPIMS process of Hf-N in an Ar-N2 atmosphere illustrates that the discharge current waveform is a an excellent indicator of the process conditions. Activating the reactive HiPIMS peak current regulation, stable process conditions were maintained when varying the N2 flow from 2.1 to 3.5 sccm by an automatic adjustment of the pulse frequency from 600 Hz to 1150 Hz and consequently an increase of the average power from 110 to 270 W. Hf-N films deposited using peak current regulation exhibited a stable stoichiometry, a nearly constant power-normalized deposition rate, and a polycrystalline cubic phase Hf-N with (111)- preferred orientation over the entire reactive gas flow range investigated. The physical reasons for the change in the current pulse waveform for different process conditions are discussed in some detail." @default.
• W2234632356 created "2016-06-24" @default.
• W2234632356 creator A5016682524 @default.
• W2234632356 creator A5031137969 @default.
• W2234632356 creator A5034910199 @default.
• W2234632356 creator A5040145458 @default.
• W2234632356 date "2016-01-12" @default.
• W2234632356 modified "2023-09-27" @default.
• W2234632356 title "Process stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride" @default.
• W2234632356 cites W1980929018 @default.
• W2234632356 cites W1989584263 @default.
• W2234632356 cites W1995758300 @default.
• W2234632356 cites W1996468461 @default.
• W2234632356 cites W1999831201 @default.
• W2234632356 cites W2002971884 @default.
• W2234632356 cites W2006987760 @default.
• W2234632356 cites W2013019774 @default.
• W2234632356 cites W2013627774 @default.
• W2234632356 cites W2014480904 @default.
• W2234632356 cites W2018672634 @default.
• W2234632356 cites W2030514611 @default.
• W2234632356 cites W2034433960 @default.
• W2234632356 cites W2040337195 @default.
• W2234632356 cites W2051944828 @default.
• W2234632356 cites W2055310399 @default.
• W2234632356 cites W2059812125 @default.
• W2234632356 cites W2062346493 @default.
• W2234632356 cites W2063568940 @default.
• W2234632356 cites W2068596590 @default.
• W2234632356 cites W2070623790 @default.
• W2234632356 cites W2074108115 @default.
• W2234632356 cites W2076672546 @default.
• W2234632356 cites W2077690678 @default.
• W2234632356 cites W2082572347 @default.
• W2234632356 cites W2084461123 @default.
• W2234632356 cites W2090071143 @default.
• W2234632356 cites W2092347755 @default.
• W2234632356 cites W2096779663 @default.
• W2234632356 cites W2097650352 @default.
• W2234632356 cites W2105891581 @default.
• W2234632356 cites W2144526177 @default.
• W2234632356 cites W2145787996 @default.
• W2234632356 cites W2161508873 @default.
• W2234632356 cites W2256487959 @default.
• W2234632356 cites W2326840659 @default.
• W2234632356 doi "https://doi.org/10.1088/0022-3727/49/6/065202" @default.
• W2234632356 hasPublicationYear "2016" @default.
• W2234632356 type Work @default.
• W2234632356 sameAs 2234632356 @default.
• W2234632356 citedByCount "18" @default.
• W2234632356 countsByYear W22346323562016 @default.
• W2234632356 countsByYear W22346323562017 @default.
• W2234632356 countsByYear W22346323562018 @default.
• W2234632356 countsByYear W22346323562019 @default.
• W2234632356 countsByYear W22346323562020 @default.
• W2234632356 countsByYear W22346323562021 @default.
• W2234632356 crossrefType "journal-article" @default.
• W2234632356 hasAuthorship W2234632356A5016682524 @default.
• W2234632356 hasAuthorship W2234632356A5031137969 @default.
• W2234632356 hasAuthorship W2234632356A5034910199 @default.
• W2234632356 hasAuthorship W2234632356A5040145458 @default.
• W2234632356 hasBestOaLocation W22346323562 @default.
• W2234632356 hasConcept C113196181 @default.
• W2234632356 hasConcept C119599485 @default.
• W2234632356 hasConcept C121332964 @default.
• W2234632356 hasConcept C127413603 @default.
• W2234632356 hasConcept C165801399 @default.
• W2234632356 hasConcept C171250308 @default.
• W2234632356 hasConcept C185592680 @default.
• W2234632356 hasConcept C19067145 @default.
• W2234632356 hasConcept C192562407 @default.
• W2234632356 hasConcept C197424946 @default.
• W2234632356 hasConcept C22423302 @default.
• W2234632356 hasConcept C2776620479 @default.
• W2234632356 hasConcept C43617362 @default.
• W2234632356 hasConcept C61427134 @default.
• W2234632356 hasConcept C62520636 @default.
• W2234632356 hasConcept C70836080 @default.
• W2234632356 hasConcept C97892325 @default.
• W2234632356 hasConceptScore W2234632356C113196181 @default.
• W2234632356 hasConceptScore W2234632356C119599485 @default.
• W2234632356 hasConceptScore W2234632356C121332964 @default.
• W2234632356 hasConceptScore W2234632356C127413603 @default.
• W2234632356 hasConceptScore W2234632356C165801399 @default.
• W2234632356 hasConceptScore W2234632356C171250308 @default.
• W2234632356 hasConceptScore W2234632356C185592680 @default.
• W2234632356 hasConceptScore W2234632356C19067145 @default.
• W2234632356 hasConceptScore W2234632356C192562407 @default.
• W2234632356 hasConceptScore W2234632356C197424946 @default.
• W2234632356 hasConceptScore W2234632356C22423302 @default.
• W2234632356 hasConceptScore W2234632356C2776620479 @default.
• W2234632356 hasConceptScore W2234632356C43617362 @default.
• W2234632356 hasConceptScore W2234632356C61427134 @default.
• W2234632356 hasConceptScore W2234632356C62520636 @default.
• W2234632356 hasConceptScore W2234632356C70836080 @default.
• W2234632356 hasConceptScore W2234632356C97892325 @default.
• W2234632356 hasFunder F4320322581 @default.
• W2234632356 hasFunder F4320323224 @default.

• next