Matches in SemOpenAlex for { <https://semopenalex.org/work/W2236600932> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2236600932 abstract "Abstract This paper presents a comparison between worst-case and distributional uncertainty analysis in a thin film deposition process. The key idea is to evaluate the effect of model parameter uncertainties on thin film properties employing power series expansion (PSE). The worst-case deviation in the film properties is obtained under bounded parameter uncertainties while the probabilistic bounds are estimated under distributional uncertainties. To describe the growth process on the surface of a substrate, a multiscale approach that integrates kinetic Monte Carlo (KMC) simulations with continuum modelling is employed. The uncertainty analysis in this work is applied to estimate the optimal substrate temperature profile for robust optimization of the thin film end-point properties." @default.
- W2236600932 created "2016-06-24" @default.
- W2236600932 creator A5022159193 @default.
- W2236600932 creator A5043725286 @default.
- W2236600932 date "2015-01-01" @default.
- W2236600932 modified "2023-10-04" @default.
- W2236600932 title "Worst-case and Distributional Robustness Analysis of a Thin Film Deposition Process" @default.
- W2236600932 cites W1523740859 @default.
- W2236600932 cites W1563898868 @default.
- W2236600932 cites W1991576025 @default.
- W2236600932 cites W1991929569 @default.
- W2236600932 cites W2003264955 @default.
- W2236600932 cites W2036403017 @default.
- W2236600932 cites W2047425478 @default.
- W2236600932 cites W2054023437 @default.
- W2236600932 cites W2057896693 @default.
- W2236600932 cites W2079000916 @default.
- W2236600932 cites W2125038138 @default.
- W2236600932 cites W2132500407 @default.
- W2236600932 cites W2147973136 @default.
- W2236600932 cites W2171594132 @default.
- W2236600932 doi "https://doi.org/10.1016/j.ifacol.2015.09.119" @default.
- W2236600932 hasPublicationYear "2015" @default.
- W2236600932 type Work @default.
- W2236600932 sameAs 2236600932 @default.
- W2236600932 citedByCount "2" @default.
- W2236600932 countsByYear W22366009322015 @default.
- W2236600932 countsByYear W22366009322016 @default.
- W2236600932 crossrefType "journal-article" @default.
- W2236600932 hasAuthorship W2236600932A5022159193 @default.
- W2236600932 hasAuthorship W2236600932A5043725286 @default.
- W2236600932 hasBestOaLocation W22366009321 @default.
- W2236600932 hasConcept C104317684 @default.
- W2236600932 hasConcept C105795698 @default.
- W2236600932 hasConcept C121332964 @default.
- W2236600932 hasConcept C121864883 @default.
- W2236600932 hasConcept C126255220 @default.
- W2236600932 hasConcept C134306372 @default.
- W2236600932 hasConcept C154945302 @default.
- W2236600932 hasConcept C171250308 @default.
- W2236600932 hasConcept C185592680 @default.
- W2236600932 hasConcept C19067145 @default.
- W2236600932 hasConcept C192562407 @default.
- W2236600932 hasConcept C19499675 @default.
- W2236600932 hasConcept C32230216 @default.
- W2236600932 hasConcept C33923547 @default.
- W2236600932 hasConcept C34388435 @default.
- W2236600932 hasConcept C41008148 @default.
- W2236600932 hasConcept C45786274 @default.
- W2236600932 hasConcept C49937458 @default.
- W2236600932 hasConcept C55493867 @default.
- W2236600932 hasConcept C63479239 @default.
- W2236600932 hasConceptScore W2236600932C104317684 @default.
- W2236600932 hasConceptScore W2236600932C105795698 @default.
- W2236600932 hasConceptScore W2236600932C121332964 @default.
- W2236600932 hasConceptScore W2236600932C121864883 @default.
- W2236600932 hasConceptScore W2236600932C126255220 @default.
- W2236600932 hasConceptScore W2236600932C134306372 @default.
- W2236600932 hasConceptScore W2236600932C154945302 @default.
- W2236600932 hasConceptScore W2236600932C171250308 @default.
- W2236600932 hasConceptScore W2236600932C185592680 @default.
- W2236600932 hasConceptScore W2236600932C19067145 @default.
- W2236600932 hasConceptScore W2236600932C192562407 @default.
- W2236600932 hasConceptScore W2236600932C19499675 @default.
- W2236600932 hasConceptScore W2236600932C32230216 @default.
- W2236600932 hasConceptScore W2236600932C33923547 @default.
- W2236600932 hasConceptScore W2236600932C34388435 @default.
- W2236600932 hasConceptScore W2236600932C41008148 @default.
- W2236600932 hasConceptScore W2236600932C45786274 @default.
- W2236600932 hasConceptScore W2236600932C49937458 @default.
- W2236600932 hasConceptScore W2236600932C55493867 @default.
- W2236600932 hasConceptScore W2236600932C63479239 @default.
- W2236600932 hasLocation W22366009321 @default.
- W2236600932 hasOpenAccess W2236600932 @default.
- W2236600932 hasPrimaryLocation W22366009321 @default.
- W2236600932 hasRelatedWork W1491032452 @default.
- W2236600932 hasRelatedWork W1513437178 @default.
- W2236600932 hasRelatedWork W1923058069 @default.
- W2236600932 hasRelatedWork W1988921875 @default.
- W2236600932 hasRelatedWork W1991015300 @default.
- W2236600932 hasRelatedWork W2019162454 @default.
- W2236600932 hasRelatedWork W2030116596 @default.
- W2236600932 hasRelatedWork W2044451906 @default.
- W2236600932 hasRelatedWork W2095161848 @default.
- W2236600932 hasRelatedWork W2107033896 @default.
- W2236600932 hasRelatedWork W2150047997 @default.
- W2236600932 hasRelatedWork W2169014062 @default.
- W2236600932 hasRelatedWork W2279194540 @default.
- W2236600932 hasRelatedWork W2354216296 @default.
- W2236600932 hasRelatedWork W2359261928 @default.
- W2236600932 hasRelatedWork W2884226667 @default.
- W2236600932 hasRelatedWork W2954076239 @default.
- W2236600932 hasRelatedWork W2989576403 @default.
- W2236600932 hasRelatedWork W81305065 @default.
- W2236600932 hasRelatedWork W2552891957 @default.
- W2236600932 isParatext "false" @default.
- W2236600932 isRetracted "false" @default.
- W2236600932 magId "2236600932" @default.
- W2236600932 workType "article" @default.