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• W2242034150 abstract "The effect of electrolyte's surface tension on Ni-Fe codeposition for MEMS application was studied. A nickel-iron microstructure was obtained inside high-aspect-ratio(210μm deep with 7μm width) microchannel. The internal stress and surface defect of the alloy microstructure are influenced by the presence of surfactant and applied current. Uniform distribution of deposit inside microstructure can be achieved by choosing proper current, surfactant and optimal control of hydrogen evolution reaction which can induce agitation and mitigate pH variation during electrodeposition." @default.
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• W2242034150 date "2003-01-01" @default.
• W2242034150 modified "2023-09-27" @default.
• W2242034150 title "Effect of Electrolyte Composition on Ni-Fe Deposition in LIGA Process" @default.
• W2242034150 cites W2040569498 @default.
• W2242034150 doi "https://doi.org/10.6967/jcice.200301.0107" @default.
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