Matches in SemOpenAlex for { <https://semopenalex.org/work/W2242809207> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2242809207 abstract "The femtosecond laser drilling for metal thin film is theoretically investigated in this paper. Femtosecond laser patterning of metal thin films is of technological significance because the fabrication of electrodes or metallization lines is a key process commonly required in the manufacturing of modern electronic devices. A femtosecond pulsed laser has a temporally short pulse that does not cause significant heat conduction in the material. This property of femtosecond laser pulse drilling makes sub-micron machining achievable with laser irradiation. Considering vaporization as the mechanism of the material removal, this paper employs two-temperature model to analyze the thermal process for femtosecond laser drilling of metal thin film. The variations of the drilling rate and squared diameter with laser fluence are compared with the available experimental data. This study also analytically validates that the drilling depth per pulse is governed by the optical penetration depth for low laser fluences and the squared crater diameter is linearly in proportion to the logarithm of laser fluence." @default.
- W2242809207 created "2016-06-24" @default.
- W2242809207 creator A5028750808 @default.
- W2242809207 creator A5030307944 @default.
- W2242809207 creator A5042683919 @default.
- W2242809207 date "2015-05-01" @default.
- W2242809207 modified "2023-09-27" @default.
- W2242809207 title "Thermal Process of Drilling for Metal Thin Films Using Femtosecond Laser" @default.
- W2242809207 cites W1965041337 @default.
- W2242809207 cites W1972382058 @default.
- W2242809207 cites W1981541726 @default.
- W2242809207 cites W2006756320 @default.
- W2242809207 cites W2013155737 @default.
- W2242809207 cites W2080128283 @default.
- W2242809207 cites W2140439737 @default.
- W2242809207 doi "https://doi.org/10.4028/www.scientific.net/amm.764-765.102" @default.
- W2242809207 hasPublicationYear "2015" @default.
- W2242809207 type Work @default.
- W2242809207 sameAs 2242809207 @default.
- W2242809207 citedByCount "0" @default.
- W2242809207 crossrefType "journal-article" @default.
- W2242809207 hasAuthorship W2242809207A5028750808 @default.
- W2242809207 hasAuthorship W2242809207A5030307944 @default.
- W2242809207 hasAuthorship W2242809207A5042683919 @default.
- W2242809207 hasConcept C120665830 @default.
- W2242809207 hasConcept C121332964 @default.
- W2242809207 hasConcept C153294291 @default.
- W2242809207 hasConcept C159985019 @default.
- W2242809207 hasConcept C167735695 @default.
- W2242809207 hasConcept C171250308 @default.
- W2242809207 hasConcept C172100665 @default.
- W2242809207 hasConcept C19067145 @default.
- W2242809207 hasConcept C191897082 @default.
- W2242809207 hasConcept C192562407 @default.
- W2242809207 hasConcept C195801359 @default.
- W2242809207 hasConcept C204530211 @default.
- W2242809207 hasConcept C22078206 @default.
- W2242809207 hasConcept C25197100 @default.
- W2242809207 hasConcept C2778386843 @default.
- W2242809207 hasConcept C2780997931 @default.
- W2242809207 hasConcept C2984025587 @default.
- W2242809207 hasConcept C49040817 @default.
- W2242809207 hasConcept C520434653 @default.
- W2242809207 hasConcept C523214423 @default.
- W2242809207 hasConcept C97355855 @default.
- W2242809207 hasConceptScore W2242809207C120665830 @default.
- W2242809207 hasConceptScore W2242809207C121332964 @default.
- W2242809207 hasConceptScore W2242809207C153294291 @default.
- W2242809207 hasConceptScore W2242809207C159985019 @default.
- W2242809207 hasConceptScore W2242809207C167735695 @default.
- W2242809207 hasConceptScore W2242809207C171250308 @default.
- W2242809207 hasConceptScore W2242809207C172100665 @default.
- W2242809207 hasConceptScore W2242809207C19067145 @default.
- W2242809207 hasConceptScore W2242809207C191897082 @default.
- W2242809207 hasConceptScore W2242809207C192562407 @default.
- W2242809207 hasConceptScore W2242809207C195801359 @default.
- W2242809207 hasConceptScore W2242809207C204530211 @default.
- W2242809207 hasConceptScore W2242809207C22078206 @default.
- W2242809207 hasConceptScore W2242809207C25197100 @default.
- W2242809207 hasConceptScore W2242809207C2778386843 @default.
- W2242809207 hasConceptScore W2242809207C2780997931 @default.
- W2242809207 hasConceptScore W2242809207C2984025587 @default.
- W2242809207 hasConceptScore W2242809207C49040817 @default.
- W2242809207 hasConceptScore W2242809207C520434653 @default.
- W2242809207 hasConceptScore W2242809207C523214423 @default.
- W2242809207 hasConceptScore W2242809207C97355855 @default.
- W2242809207 hasLocation W22428092071 @default.
- W2242809207 hasOpenAccess W2242809207 @default.
- W2242809207 hasPrimaryLocation W22428092071 @default.
- W2242809207 hasRelatedWork W1488081216 @default.
- W2242809207 hasRelatedWork W1865155740 @default.
- W2242809207 hasRelatedWork W1965041337 @default.
- W2242809207 hasRelatedWork W1977377998 @default.
- W2242809207 hasRelatedWork W2012191749 @default.
- W2242809207 hasRelatedWork W2017601288 @default.
- W2242809207 hasRelatedWork W2033546837 @default.
- W2242809207 hasRelatedWork W2133464078 @default.
- W2242809207 hasRelatedWork W2201212928 @default.
- W2242809207 hasRelatedWork W2248639238 @default.
- W2242809207 hasRelatedWork W2386946363 @default.
- W2242809207 hasRelatedWork W2789970379 @default.
- W2242809207 hasRelatedWork W2799534215 @default.
- W2242809207 hasRelatedWork W2810450822 @default.
- W2242809207 hasRelatedWork W2920533880 @default.
- W2242809207 hasRelatedWork W2932889087 @default.
- W2242809207 hasRelatedWork W3096442559 @default.
- W2242809207 hasRelatedWork W3208836826 @default.
- W2242809207 hasRelatedWork W2095587843 @default.
- W2242809207 hasRelatedWork W3106832722 @default.
- W2242809207 isParatext "false" @default.
- W2242809207 isRetracted "false" @default.
- W2242809207 magId "2242809207" @default.
- W2242809207 workType "article" @default.